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リソグラフィ材料:フォトレジスト、拡張、アンシラリー

LITHOGRAPHY MATERIALS

PHOTORESISTS, EXTENSIONS & ANCILLARIES

 

出版社 出版年月価格
Techcet
テクセット社
2020年6月お問い合わせください

サマリー

 

 

Report Overview

  • Covers the lithography market and supply-chain issues for such used in semiconductor device fabrication.
  • Contains data and analysis from TECHCET’s database and Sr. Analyst experience, as well as that developed from primary and secondary market research.
  • Provides focused information for supply-chain managers, process integration and R&D directors, as well as business and financial analysts.
  • Covers information about key suppliers, issues/trends in the material supply chain, estimates on supplier market share, and forecast for the material segments.


目次

Table of Contents

1 EXECUTIVE SUMMARY 9

1.1 MARKET GROWTH - REVENUES 10
1.2 EXTENSIONS 11
1.3 PRICING TRENDS 12
1.4 GROWTH SEGMENT -- EUV RESIST 13
1.5 GROWTH SEGMENT -- KRF RESIST 14
1.6 GROWTH SEGMENT -- NTD DEVELOP AND RINSE 15
1.7 PHOTORESIST MARKET SHARES 16
1.8 NEW INDUSTRY ENTRANTS 17
1.9 TECHNOLOGY TRENDS 18
1.10 ANALYST ASSESSMENT 19

2 SCOPE, PURPOSE AND METHODOLOGY 20

2.1 SCOPE 21
2.2 PURPOSE 22
2.3 METHODOLOGY 23
2.4 OVERVIEW OF OTHER TECHCET CMR - REPORTS 24

3 SEMICONDUCTOR INDUSTRY MARKET OUTLOOK 25

3.1 SEMICONDUCTOR INDUSTRY MARKET STATUS 26
3.2 WORLDWIDE ECONOMY 28
3.2.1 SEMICONDUCTOR INDUSTRIES TIES TO THE GLOBAL ECONOMY 30
3.2.2 SEMICONDUCTOR UNITS FORECAST 31
3.3 ELECTRONIC GOODS MARKET 32
3.3.1 SMART PHONES 33
3.3.2 AUTOMOTIVE 34
3.3.2.1 INCREASE IN SEMICONDUCTOR CONTENT FOR AUTOS 37
3.3.2.2 SEMICONDUCTOR CONTENT BY AUTOMOTIVE ELECTRONIC SYSTEM 38
3.3.3 SERVERS / IT 39
3.3.4 PC/TABLETS 41
3.4 SEMICONDUCTOR INDUSTRY FORECASTS 42
3.4.1 SEMICONDUCTORS UNIT GROWTH FORECAST 43
3.4.2 EQUIPMENT SPENDING AND FAB AND CAPITAL INVESTMENTS 44
3.4.3 OVERALL CHINA MARKET TRENDS 45
3.4.4 WAFER START FORECAST 46
3.5 SEMICONDUCTOR INDUSTRY MARKET OUTLOOK SUMMARY 50

4 LITHOGRAPHY MATERIALS MARKET LANDSCAPE 52

4.1 PHOTORESIST MARKET FORECASTS & MARKET DRIVERS 53
4.1.1 SEMICONDUCTOR DEVICE DEMAND DRIVES LITHO MATERIALS 54
4.1.2 2020 PHOTOLITHOGRAPHY TRENDS 55
4.1.3 OVERALL RESIST MARKET FORECAST - VOLUMES 56
4.1.3.1 OVERALL RESIST MARKET FORECAST - REVENUES 57
4.1.4 KRF GROWTH DRIVE BY 3D NAND STRUCTURES 58
4.1.4.1 KRF RESIST FORECAST - VOLUME 59
4.1.4.2 KRF RESIST FORECAST - REVENUES 60
4.1.5 I-LINE & G-LINE RESISTS STATUS & TRENDS 61
4.1.6 200MM VS. 300MM PROCESSING TRENDS IMPACTING i-line & g-line RESISTS 62
4.1.7 EUV RESIST REVENUE FORECAST 63
4.2 EXTENSION MATERIALS FORECASTS & MARKET DRIVERS 64
4.2.1 EXTENSION MATERIALS FORECAST - VOLUMES 65
4.2.1.1 Extension Materials Forecast - Revenues 66
4.2.2 KEY SUPPLIERS OF EXTENSION MATERIALS 67
4.2.3 TOP ARC (TARC) AND IMMERSION TOPCOAT STATUS & TRENDS 68
4.2.4 LINE TRIM AND CONTACT HOLE SHRINK MATERIALS STATUS & TRENDS 69
4.3 ANCILLARY MATERIALS - DEVELOPER & EBR TRENDS 70
4.3.1 POSITIVE TONE DEVELOP MATERIALS STATUS & TRENDS 71
4.3.2 NEGATIVE TONE DEVELOP (NTD) MATERIALS STATUS 72
4.3.3 RINSE MATERIALS STATUS AND CHALLENGES 73
4.3.4 NTD AND RINSE VOLUME FORECAST 74
4.3.5 EDGE BEAD REMOVERS VOLUME FORECAST TRENDS 75
4.4 EUV LITHOGRAPHY AND MATERIALS 76
4.4.1 EUV OVERVIEW 77
4.4.1.1 78
4.4.1.2 79
4.4.2 80
EUV Overview - Usage is Increasing Rapidly
EUV Overview - EUV Materials Growth Drivers & Trends
EUV RESIST FORECAST - VOLUMES
4.4.2.1 EUV RESIST FORECAST - REVENUES 81
4.4.3 EUV TECHNOLOGY TRENDS THAT IMPACT BUSINESS 82
4.4.3.1 EUV Technology Trends - Status and Overview 83
4.4.3.2 EUV Technology Trends - Challenge of Noise/Defects 84
4.4.3.3 EUV Technology - 2 Types of EUV Photoresists: CAR & MOR 86
4.4.3.4 EUV Resist Technology Trends 87
4.4.3.5 EUV Resist Technology Trends - EUV Resist Limitations 88
4.4.4 EUV LIMITATIONS TO GROWTH - LITHO TOOL SUPPLY 89
4.4.5 RESIST SUPPLIER STATUS AND ACTIVITIES 91
4.4.5.1 Resist Supplier Status and Activities - DuPont & EUV 92
4.4.6 EUV RESIST SUPPLIER STATUS AND ACTIVITY - A NOTE ABOUT EUV
ANCILLARIES 93
4.5 OTHER NEW MATERIALS FOR PATTERNING 94
4.5.1 DIRECTED SELF ASSEMBLY (DSA) HAS RENEWED ACTIVITY 95
4.5.1.1 DSA Applications Reported by Intel this year 96
4.5.2 NANO IMPRINT LITHOGRAPHY IS CLOSE TO PRODUCTION FOR 3D
NAND FLASH 97
4.5.2.1 NanoImprint Lithography (NIL) - How Does it Work - 98
4.5.3 DRY DEPOSIT AND DEVELOP EUV RESIST 99
4.5.4 NEW PATTERNING METHODS - ASSESSMENT 100
4.6 COMMENT ON REGIONAL TRENDS/DRIVERS 101
4.6.1 SOUTH KOREA WANTS MORE IMPORT INDEPENDENCE 102
4.6.2 CHINA FACTORS 103
4.6.3 TRADE TENSIONS AFFECT CHINA’S SC INDUSTRY 104
4.6.4 CHINESE DOMESTIC SUPPLIERS 105
4.7 EHS AND LOGISTIC ISSUES 106
4.7.1 PANDEMIC AFFECTS ON INTERNATIONAL SUPPLY CHAIN 107
4.7.2 PFOS AND PFAS 108

5 SUPPLIER MARKET LANDSCAPE

5.1 PHOTORESIST MARKET SHARES
5.2 PHOTORESIST SUPPLY MARKET DYNAMICS 111
5.2.1 SUPPLIER YEAR-END RESULTS & SYNOPSIS - FUJIFILM 112
5.2.2 SUPPLIER YEAR-END RESULTS & SYNOPSIS - JSR 113
5.2.3 SUPPLIER YEAR-END RESULTS & SYNOPSIS - SHIN-ETSU 114
5.2.4 SUPPLIER YEAR-END RESULTS & SYNOPSIS - SUMITOMO 115
5.2.5 SUPPLIER YEAR-END RESULTS & SYNOPSIS - TOK 116
5.2.6 SUPPLIER YEAR-END RESULTS & SYNOPSIS - DUPONT 117
5.2.7 SUPPLIER YEAR-END RESULTS & SYNOPSIS - INPRIA 118
5.3 PLANT CLOSURES AND PRODUCT DISCONTINUATIONS 119

6 SUB TIER MATERIAL SUPPLY CHAIN CONSIDERATIONS 120

6.1 RAW MATERIAL SUPPLY CHAIN CONSIDERATIONS 121
6.2 RAW MATERIALS EHS AND LOGISTICS ISSUES 122
6.3 RAW MATERIAL PRICING TRENDS 123

7 SUPPLIER PROFILES 124

FIGURES & TABLES

FIGURES

FIGURE 1: PHOTORESIST REVENUES HISTORY & FORECAST ESTIMATES 10
FIGURE 2: EXTENSION MATERIALS REVENUES HISTORY & FORECAST ESTIMATES 11
FIGURE 3: EUV RESIST REVENUES HISTORY & FORECAST ESTIMATES 13
FIGURE 4: KRF RESIST VOLUME HISTORY & FORECAST ESTIMATES 14
FIGURE 5: SOLVENT VOLUMES FOR NTD RINSE AND DEVELOP FORECAST EST.15
FIGURE 6: 2020 PHOTORESIST MARKET SHARES (% OF WW REVENUES) 16
FIGURE 7: GLOBAL ECONOMY AND THE ELECTRONICS SUPPLY CHAIN 30
FIGURE 8: WORLDWIDE SEMICONDUCTOR SALES 31
FIGURE 9: SEMICONDUCTOR CHIP APPLICATIONS 32
FIGURE 10: MOBILE PHONE SHIPMENTS WW ESTIMATES 33
FIGURE 11: OIL PRICE PER BARREL US WTI 35
FIGURE 12: SEMICONDUCTOR SPEND PER VEHICLE TYPE 37
FIGURE 13: SEMICONDUCTOR CONTENT BY AUTOMOTIVE APPLICATION 38
FIGURE 14: SEMICONDUCTOR REVENUE GROWTH FORECASTS 42
FIGURE 15: SEMICONDUCTOR UNITS HISTORY AND FORECAST 43
FIGURE 16: 200 MM WAFER CAPACITY FORECAST 46
FIGURE 17: 2020/ 2019 GROWTH ESTIMATES FOR 3DNAN, DRAM AND LOGIC DEVICES (ADVANCED NODES AND LEADING EDGE) 48
FIGURE 18: 2020 OUTLOOK 51
FIGURE 19: ADVANCED NODE WAFER STARTS (RELATIVE 200MM EQUIV.) 54
FIGURE 20: RESIST VOLUMES HISTORY & FORECAST ESTIMATES 56
FIGURE 21 :PHOTORESIST HISTORY & FORECAST ESTIMATES 57
FIGURE 22: 2D AND 3D NAND STRUCTURES 58
FIGURE 23: KRF RESIST VOLUMES HISTORY & FORECAST ESTIMATES 59
FIGURE 24: KRF RESIST REVENUES HISTORY & FORECAST ESTIMATES 60
FIGURE 25: EUV RESIST REVENUES HISTORY & FORECAST ESTIMATES 63
FIGURE 26: EXTENSIONS VOLUMES HISTORY & FORECAST ESTIMATES 65
FIGURE 27: EXTENSIONS REVENUES HISTORY & FORECAST ESTIMATES 66
FIGURE 28 : SOLVENT VOLUMES FOR NTD RINSE & DEVELOP FORECAST EST. 74
FIGURE 29 :EBR RELATIVE VOLUMES* HISTORY & FORECAST ESTIMATES 75
FIGURE 30: EUV LAYERS EVOLUTION 79
FIGURE 31: EUV RESIST VOLUME 5-YEAR FORECAST 80
FIGURE 32: EUV RESIST REVENUE 5-YEAR FORECAST 81
FIGURE 33: EUV LITHOGRAPHY OPTICAL PATH 83
FIGURE 34: EUV LITHOGRAPHY NOISE 8
FIGURE 35: EUV LIGHT AND PHOTON ABSORPTION GIVES NOISE 85
FIGURE 36: CAR RESIST ACTIVATION MECHANISM 86
FIGURE 37: EUV MOR RESIST ACTIVATION MECHANISM 86
FIGURE 38: RESOLUTION VS. EXPOSURE DOSE* 88
FIGURE 39: EUV TOOL CAPACITY 90
FIGURE 40: RECTIFICATION OF EUV PATTERNS 96
FIGURE 41: NANOIMPRINT PROCESS 98
FIGURE 42: RESIST VOLUME 107
FIGURE 43: 2020 PHOTORESIST MARKET SHARES 110

TABLES

TABLE 1: COVID-19 LOCKDOWNS AND RESTRICTIONS BY REGION(APRIL 2020) 27
TABLE 2: GLOBAL GDP AND SEMICONDUCTOR REVENUES* 28
TABLE 3: IMF WORLD ECONOMIC OUTLOOK* 29
TABLE 4: 2020 AUTO INDUSTRY GROWTH IMPACT FACTORS 36
TABLE 5: DATA CENTER SYSTEMS AND COMMUNICATION SERVICES FORECAST 2020 40
TABLE 6: WORLDWIDE DEVICE SHIPMENTS BY DEVICE TYPE, 2020-2022 41
TABLE 7: 2019 INVESTMENT PLANS FOR SELECTED DEVICE COMPANIES 44
TABLE 8: CHINA FABS CAPABILITIES STATUS 45
TABLE 9: 2020/ 2019 GROWTH ESTIMATES FOR 3DNAND, DRAM AND LOGIC DEVICES (ADVANCED NODES AND LEADING EDGE) 47
TABLE 10: SUPPLIERS OF NOTE FOR EXTENSION MATERIALS 67
TABLE 11: JSR TARGET OF VALUEACT 113

 

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