Summary

TSV is a vertical electrical connection that passes completely through a silicon wafer or chip to create 3D ICs or packages. The drivers for market adoption of 3D ICs are increased performance, reduced form factor and cost reduction. This report analyzes the market for TSV ICs, equipment, and materials.

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Table of Contents

Chapter 1 Introduction 1:  1
Chapter 2 Insight Into Critical Issues 2:  1
2.1 Driving Forces In 3:  D TSV 2:  1
2.2 Benefits of 3:  D ICs With TSVs 2:  2
2.3 Requirements For A Cost Effective 3:  D Die Stacking Technology 2:  3
2.4 TSV Technology Challenges 2:  4
2.5 TSV Supply Chain Challenge 2:  13
2.6 Limitations of 3:  D Packaging Technology 2:  14
2.6.1 Thermal Management 2:  14
2.6.2 Cost 2:  16
2.6.3 Design Complexity 2:  16
2.6.4 Time to Delivery 2:  17

Chapter 3 Cost Structure 3:  1
3.1 Cost Structure of 3:  D chip Stacks 3:  1
3.2 Cost of Ownership 3:  5

Chapter 4 Critical Processing Technologies 4:  1
4.1 Introduction 4:  1
4.2 Cu Plating 4:  3
4.3 Lithography 4:  5
4.3.1 Optical Lithography 4:  5
4.3.2 Imprint Lithography 4:  6
4.3.3 Resist Coat 4:  7
4.4 Plasma Etch Technology 4:  8
4.5 Stripping/Cleaning 4:  12
4.6 Thin Wafer Bonding 4:  14
4.7 Wafer Thinning/CMP 4:  19
4.8 Stacking 4:  20
4.9 Metrology/Inspection 4:  22

Chapter 5 Evaluation Of Critical Development Segments 5:  1
5.1 Introduction 5:  1
5.2 Via:  first 5:  3
5.2.1 Equipment Requirements 5:  5
5.2.2 Material Requirements 5:  7
5.3 Via:  Middle 5:  8
5.3.1 Equipment Requirements 5:  10
5.3.2 Material Requirements 5:  11
5.4 Via:  Last 5:  14
5.4.1 Equipment Requirements 5:  14
5.4.2 Material Requirements 5:  15
5.5 Interposers 5:  17

Chapter 6 Profiles Of Participants 6:  1
6.1 Chip Manufacturers/Packaging Houses/Services 6:  1
6.2 Equipment Suppliers 6:  18
6.3 Material Suppliers 6:  24
6.4 R&D 6:  29

Chapter 7 Market Analysis 7:  1
7.1 TSV Device Roadmap 7:  1
7.2 TSV Device Forecast 7:  3
7.3 Equipment Forecast 7:  8
7.4 Material Forecast 7:  11

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List of Tables/Graphs

List of Tables
1.1 3-D Mass Memory Volume Comparison Between Other Technologies And TI’s 3-D Technology 1-8
1.2 3-D Mass Memory Weight Comparison Between Other Technologies And TI’s 3-D Technology 1-9
3.1 Cost Of Ownership Comparison 3-15
4.1 Via Middle Metrology/Inspection Requirements 4-24
4.2 Via Last Metrology/Inspection Requirements 4-26
7.1 Forecast Of TSV Devices By Units 7-4
7.2 Forecast Of TSV Devices By Wafers 7-6
7.3 Forecast Of TSV Equipment by Type 7-9

List of Figures
1.1 3-D Technology On Dram Density 1-2
1.2 3-D Through-Silicon Via (TSV) 1-6
1.3 Graphical Illustration Of The Silicon Efficiency Between MCMs And 3-D Technology 1-10
1.4 Silicon Efficiency Comparison Between 3D Packaging Technology and Other Conventional Packaging Technologies 1-11
2.1 TSV Fabrication Process Challenges 2-6
2.2 TSV Fabrication Process Challenge - Cu Protrusion 2-7
2.3 TSV Reliability Challenges 2-10
2.4 Via Middle Process Integration Challenges 2-11
2.5 Via Middle Process Integration Challenges 2-12
3.1 Cost Structure of D2W and W2W 3-2
3.2 Assembly Cost Analysis 3-4
3.2 Cost Structure Of Different Vias And Tools 3-4
3.3 Cost Of Ownership For 5 X 50 TSV VIA Middle 3-6
3.4 Cost Of CMP For TSV VIA Middle Process 3-7
3.5 Cost Of Ownership For 10 X 100 TSV Via Middle 3-8
3.6 Cost Structure Of TSVs 5 X 50 μm 3-10
3.7 Interposer TSV: Upscaling To 10 X 100 μm 3-11
3.8 TSV Downscaling To 3×50 μm 3-12
3.9 Cost Structure Of Different Vias And Tools 3-14
3.10 Via First Cost Of Ownership 3-16
3.11 Via First Cost Of Ownership Front And Back Side 3-18
3.12 Via First Process Flow 3-19
3.13 iTSV Versus pTSV Cost Of Ownership 3-21
3.14 Effect Of TSV Depth And Diameter On Cost 3-22
4.1 Illustration Of Bosch Process 4-10
4.2 Key Via Middle TSV Process Steps 4-23
4.3 Key Last TSC Process Steps 4-25
5.1 VIA First, Middle, And Last Process Flows 5-2
5,2 VIA First TSV Process Flow 5-4
5.3 VIA Middle TSV Process Flow 5-9
5.4 Soft Reveal Process 5-13
5.5 VIA Last TSV Process Flow 5-15
5.6 Comparison Between 2.5D And 3D 5-18
5.7 TSV Interposer Cross Sectional Schematic With RDL Layer 5-20
5.8 Process Flow For RDL And UBM 5-21
7.1 Leading Edge TSV Roadmap 7-2
7.2 Forecast Of TSV Devices By Units 7-5
7.3 Forecast Of TSV Devices By Wafers 7-7
7.4 Forecast Of TSV Equipment by Type 7-10
7.5 Forecast Of TSV Materials 7-12