Summary

The global Silicon Carbide Manufacturing Equipment market size is predicted to grow from US$ 3207 million in 2025 to US$ 8035 million in 2032; it is expected to grow at a CAGR of 14.8% from 2026 to 2032.
SiC Semiconductor Manufacturing Equipment refers to the core toolsets required across the SiC value chain?SiC substrate manufacturing, SiC epitaxy, and SiC device front-end processing?with the emphasis on tools that directly determine yield, reliability, and cost per cm?. Compared with silicon, SiC processing imposes distinct equipment requirements driven by (i) a hard/brittle wafering and surface-finishing regime, and (ii) a device flow that typically depends on heated ion implantation, very high-temperature activation anneals, and robust plasma etching/ohmic-contact formation, making thermal budgets, chamber materials, particle control, and defect sensitivity materially more demanding.
The market can be framed around 10 core equipment categories: (1) SiC crystal growth (PVT) platforms engineered for long-cycle thermal-field stability (e.g., PVA TePla/CGS highlights PVT systems for SiC single crystals); (2) boule processing & wafering (orientation/end-face, slicing) to reduce kerf loss and increase wafers per boule (e.g., DISCO’s KABRA laser ingot slicing applicable to SiC; Okamoto’s SiC ingot grinding/orientation workflow); (3) wafer surface finishing (grinding/lapping/DSP/CMP) to reach tight TTV/warp and nanometer-scale surfaces (e.g., EBARA CMP systems emphasize nano-level planarity and contamination/particle mitigation concepts); (4) cleaning & surface preparation (single-wafer/batch, megasonic, dry-in/dry-out) to manage particle sensitivity (e.g., SCREEN single-wafer cleaner product line); (5) metrology & defect inspection for substrates/epi/patterned wafers?closing feedback loops on BPDs/stacking faults and other SiC-relevant defects (e.g., KLA Candela for SiC-oriented inspection and classification); (6) SiC epitaxy (high-temperature CVD reactors) focused on low defectivity, thickness/doping uniformity, and output per m? (e.g., AIXTRON G10-SiC for 150/200 mm; ASM PE2O8 positioned for yield/throughput/cost); (7) lithography & track (often mainstream silicon toolsets, but critical for trench/termination patterning); (8) plasma etch & ash/strip where SiC deep/trench etches demand high-density plasma with low damage and tight profile control (e.g., Oxford Instruments’ ICP-RIE tooling and SiC-focused etch content); (9) thin film deposition & metallization (CVD/ALD/PVD) for dielectrics/barriers/metals (Applied Materials summarizes PVD/CVD/ALD as core deposition technologies in semiconductor manufacturing); and (10) doping & thermal processing (implant/activation anneal/oxidation) that defines the SiC “high-temperature window” (Axcelis highlights high-temperature implant capability and Si/SiC flexibility; Nissin highlights high-temperature SiC implantation; centrotherm positions c.ACTIVATOR for up to 2000°C anneals and c.OXIDATOR for SiC oxidation/anneal up to 1500°C).
The equipment challenge in SiC is inherently cross-step coupled: upstream wafering/surface finishing must minimize damage layers and particles on a hard/brittle material; epitaxy must control defect propagation and doping/thickness uniformity that directly map into device blocking/leakage behavior; and device fabrication typically requires heated implantation followed by extreme-temperature activation anneals, while plasma etches (especially trenches/deep features) must balance rate, selectivity, and low-damage surfaces to avoid reliability penalties (interface traps, leakage, oxide integrity). Meanwhile, SiC’s defect spectrum (e.g., BPDs, stacking faults) drives a stronger pull for inspection + classification + feedback earlier in the flow to reduce downstream scrap of high-value processed wafers.
The current industry posture is moving from “materials bottleneck” to “manufacturing system competition,” where tool value is measured by throughput × yield × repeatability × cost-of-ownership rather than single-step capability. A second structural driver is the accelerating transition toward 200 mm SiC manufacturing, which triggers a new capex cycle across epitaxy, thermal, metrology, and cleaning. Public disclosures illustrate this clearly: Infineon explicitly references shifting SiC manufacturing to 200-mm wafers; ST announced a high-volume 200-mm SiC manufacturing facility in Catania; and Wolfspeed continues to position 200-mm materials/device scaling as central to its roadmap. On the equipment side, AIXTRON’s G10-SiC shipment milestone explicitly ties demand to ramping 200-mm SiC epitaxy capacity?highlighting high-throughput epitaxy as a key expansion lever.
Looking forward, equipment growth is driven by (i) electrification and energy-efficiency demand from EV (incl. 800V architectures), renewables/storage, industrial power and grid, sustaining SiC capacity build-outs; (ii) the industry pivot from capacity to cost curve reduction, pushing tool roadmaps toward higher wafer output per m?, longer stable runs, and deeper automation/SPC; and (iii) three practical “battlefields” for tool innovation: wafering/surface finishing (damage/kerf reduction), epitaxy (defectivity + throughput), and implant/anneal/oxidation/clean (high-temperature capability with ultra-low contamination). Along the chain, upstream consumables and critical parts (hot-zone materials, process gases/chemicals, chamber materials/coatings) increasingly co-evolve with tool design; midstream equipment suppliers differentiate via integrated process windows and service uptime; and downstream SiC substrate/epi/device makers require faster qualification loops?making joint development and platform standardization more common in the 200-mm era.
LP Information, Inc. (LPI) ' newest research report, the “Silicon Carbide Manufacturing Equipment Industry Forecast” looks at past sales and reviews total world Silicon Carbide Manufacturing Equipment sales in 2025, providing a comprehensive analysis by region and market sector of projected Silicon Carbide Manufacturing Equipment sales for 2026 through 2032. With Silicon Carbide Manufacturing Equipment sales broken down by region, market sector and sub-sector, this report provides a detailed analysis in US$ millions of the world Silicon Carbide Manufacturing Equipment industry.
This Insight Report provides a comprehensive analysis of the global Silicon Carbide Manufacturing Equipment landscape and highlights key trends related to product segmentation, company formation, revenue, and market share, latest development, and M&A activity. This report also analyzes the strategies of leading global companies with a focus on Silicon Carbide Manufacturing Equipment portfolios and capabilities, market entry strategies, market positions, and geographic footprints, to better understand these firms’ unique position in an accelerating global Silicon Carbide Manufacturing Equipment market.
This Insight Report evaluates the key market trends, drivers, and affecting factors shaping the global outlook for Silicon Carbide Manufacturing Equipment and breaks down the forecast by Wafer Size, by Application, geography, and market size to highlight emerging pockets of opportunity. With a transparent methodology based on hundreds of bottom-up qualitative and quantitative market inputs, this study forecast offers a highly nuanced view of the current state and future trajectory in the global Silicon Carbide Manufacturing Equipment.
This report presents a comprehensive overview, market shares, and growth opportunities of Silicon Carbide Manufacturing Equipment market by product type, application, key manufacturers and key regions and countries.
Segmentation by Wafer Size:
150mm SiC Equipment
200mm SiC Equipment
Others
Segmentation by Device Type:
SiC MOSFET
SiC Diode
Others
Segmentation by Equipment Type:
SiC Epitaxy/HTCVD Equipment
SiC Thin-Film Deposition & Metallization
SiC Thermal Processing Equipment
SiC Thinning and CMP Equipment
SiC Plasma Etch & Ash/Strip
Wafer Cleaning & Surface Preparation
SiC Ion Implanters
Lithography & Track (Coater/Developer)
SiC Metrology and Inspection
Others
Segmentation by Application:
SiC Substrate Manufacturing
SiC Epitaxy Manufacturing
SiC Device Manufacturing
This report also splits the market by region:
Americas
United States
Canada
Mexico
Brazil
APAC
China
Japan
Korea
Southeast Asia
India
Australia
Europe
Germany
France
UK
Italy
Russia
Middle East & Africa
Egypt
South Africa
Israel
Turkey
GCC Countries
The below companies that are profiled have been selected based on inputs gathered from primary experts and analysing the company's coverage, product portfolio, its market penetration.
Applied Materials
KLA SPTS
Lam
Tel
Axcelis
Centrotherm
ULVAC
PVA TePla
NAURA
Kokusai
SCREEN
Sumitomo
Nissin Ion
Oxford Instruments
ASML
Nikon
Canon
AIXTRON
ASM/LPE
Accretech
DISCO
Okamoto
Lasertec
Advantest
Teradyne
Crystal Growth & Energy Equipment Inc.
Han's Laser Technology Industry
Beijing TSD Semiconductor Co., Ltd.
Shenzhen Naso Tech
Beijing U-Precision Tech
AMIES Technology
Gurui Semiconductor Equipment (Guangzhou)
Angkun Vision (Beijing) Technology
Key Questions Addressed in this Report
What is the 10-year outlook for the global Silicon Carbide Manufacturing Equipment market?
What factors are driving Silicon Carbide Manufacturing Equipment market growth, globally and by region?
Which technologies are poised for the fastest growth by market and region?
How do Silicon Carbide Manufacturing Equipment market opportunities vary by end market size?
How does Silicon Carbide Manufacturing Equipment break out by Wafer Size, by Application?

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Table of Contents

1 Scope of the Report
1.1 Market Introduction
1.2 Years Considered
1.3 Research Objectives
1.4 Market Research Methodology
1.5 Research Process and Data Source
1.6 Economic Indicators
1.7 Currency Considered
1.8 Market Estimation Caveats
2 Executive Summary
2.1 World Market Overview
2.1.1 Global Silicon Carbide Manufacturing Equipment Annual Sales 2021-2032
2.1.2 World Current & Future Analysis for Silicon Carbide Manufacturing Equipment by Geographic Region, 2021, 2025 & 2032
2.1.3 World Current & Future Analysis for Silicon Carbide Manufacturing Equipment by Country/Region, 2021, 2025 & 2032
2.2 Silicon Carbide Manufacturing Equipment Segment by Wafer Size
2.2.1 150mm SiC Equipment
2.2.2 200mm SiC Equipment
2.2.3 Others
2.2.4 Silicon Carbide Manufacturing Equipment Sales by Wafer Size
2.2.4.1 Global Silicon Carbide Manufacturing Equipment Sales Market Share by Wafer Size (2021-2026)
2.2.4.2 Global Silicon Carbide Manufacturing Equipment Revenue and Market Share by Wafer Size (2021-2026)
2.2.4.3 Global Silicon Carbide Manufacturing Equipment Sale Price by Wafer Size (2021-2026)
2.3 Silicon Carbide Manufacturing Equipment Segment by Device Type
2.3.1 SiC MOSFET
2.3.2 SiC Diode
2.3.3 Others
2.3.4 Silicon Carbide Manufacturing Equipment Sales by Device Type
2.3.4.1 Global Silicon Carbide Manufacturing Equipment Sales Market Share by Device Type (2021-2026)
2.3.4.2 Global Silicon Carbide Manufacturing Equipment Revenue and Market Share by Device Type (2021-2026)
2.3.4.3 Global Silicon Carbide Manufacturing Equipment Sale Price by Device Type (2021-2026)
2.4 Silicon Carbide Manufacturing Equipment Segment by Equipment Type
2.4.1 SiC Epitaxy/HTCVD Equipment
2.4.2 SiC Thin-Film Deposition & Metallization
2.4.3 SiC Thermal Processing Equipment
2.4.4 SiC Thinning and CMP Equipment
2.4.5 SiC Plasma Etch & Ash/Strip
2.4.6 Wafer Cleaning & Surface Preparation
2.4.7 SiC Ion Implanters
2.4.8 Lithography & Track (Coater/Developer)
2.4.9 SiC Metrology and Inspection
2.4.10 Silicon Carbide Manufacturing Equipment Sales by Equipment Type
2.4.10.1 Global Silicon Carbide Manufacturing Equipment Sales Market Share by Equipment Type (2021-2026)
2.4.10.2 Global Silicon Carbide Manufacturing Equipment Revenue and Market Share by Equipment Type (2021-2026)
2.4.10.3 Global Silicon Carbide Manufacturing Equipment Sale Price by Equipment Type (2021-2026)
2.5 Silicon Carbide Manufacturing Equipment Segment by Application
2.5.1 SiC Substrate Manufacturing
2.5.2 SiC Epitaxy Manufacturing
2.5.3 SiC Device Manufacturing
2.5.4 Silicon Carbide Manufacturing Equipment Sales by Application
2.5.4.1 Global Silicon Carbide Manufacturing Equipment Sale Market Share by Application (2021-2026)
2.5.4.2 Global Silicon Carbide Manufacturing Equipment Revenue and Market Share by Application (2021-2026)
2.5.4.3 Global Silicon Carbide Manufacturing Equipment Sale Price by Application (2021-2026)
3 Global by Company
3.1 Global Silicon Carbide Manufacturing Equipment Breakdown Data by Company
3.1.1 Global Silicon Carbide Manufacturing Equipment Annual Sales by Company (2021-2026)
3.1.2 Global Silicon Carbide Manufacturing Equipment Sales Market Share by Company (2021-2026)
3.2 Global Silicon Carbide Manufacturing Equipment Annual Revenue by Company (2021-2026)
3.2.1 Global Silicon Carbide Manufacturing Equipment Revenue by Company (2021-2026)
3.2.2 Global Silicon Carbide Manufacturing Equipment Revenue Market Share by Company (2021-2026)
3.3 Global Silicon Carbide Manufacturing Equipment Sale Price by Company
3.4 Key Manufacturers Silicon Carbide Manufacturing Equipment Producing Area Distribution, Sales Area, Product Type
3.4.1 Key Manufacturers Silicon Carbide Manufacturing Equipment Product Location Distribution
3.4.2 Players Silicon Carbide Manufacturing Equipment Products Offered
3.5 Market Concentration Rate Analysis
3.5.1 Competition Landscape Analysis
3.5.2 Concentration Ratio (CR3, CR5 and CR10) & (2024-2026)
3.6 New Products and Potential Entrants
3.7 Market M&A Activity & Strategy
4 World Historic Review for Silicon Carbide Manufacturing Equipment by Geographic Region
4.1 World Historic Silicon Carbide Manufacturing Equipment Market Size by Geographic Region (2021-2026)
4.1.1 Global Silicon Carbide Manufacturing Equipment Annual Sales by Geographic Region (2021-2026)
4.1.2 Global Silicon Carbide Manufacturing Equipment Annual Revenue by Geographic Region (2021-2026)
4.2 World Historic Silicon Carbide Manufacturing Equipment Market Size by Country/Region (2021-2026)
4.2.1 Global Silicon Carbide Manufacturing Equipment Annual Sales by Country/Region (2021-2026)
4.2.2 Global Silicon Carbide Manufacturing Equipment Annual Revenue by Country/Region (2021-2026)
4.3 Americas Silicon Carbide Manufacturing Equipment Sales Growth
4.4 APAC Silicon Carbide Manufacturing Equipment Sales Growth
4.5 Europe Silicon Carbide Manufacturing Equipment Sales Growth
4.6 Middle East & Africa Silicon Carbide Manufacturing Equipment Sales Growth
5 Americas
5.1 Americas Silicon Carbide Manufacturing Equipment Sales by Country
5.1.1 Americas Silicon Carbide Manufacturing Equipment Sales by Country (2021-2026)
5.1.2 Americas Silicon Carbide Manufacturing Equipment Revenue by Country (2021-2026)
5.2 Americas Silicon Carbide Manufacturing Equipment Sales by Wafer Size (2021-2026)
5.3 Americas Silicon Carbide Manufacturing Equipment Sales by Application (2021-2026)
5.4 United States
5.5 Canada
5.6 Mexico
5.7 Brazil
6 APAC
6.1 APAC Silicon Carbide Manufacturing Equipment Sales by Region
6.1.1 APAC Silicon Carbide Manufacturing Equipment Sales by Region (2021-2026)
6.1.2 APAC Silicon Carbide Manufacturing Equipment Revenue by Region (2021-2026)
6.2 APAC Silicon Carbide Manufacturing Equipment Sales by Wafer Size (2021-2026)
6.3 APAC Silicon Carbide Manufacturing Equipment Sales by Application (2021-2026)
6.4 China
6.5 Japan
6.6 South Korea
6.7 Southeast Asia
6.8 India
6.9 Australia
6.10 China Taiwan
7 Europe
7.1 Europe Silicon Carbide Manufacturing Equipment by Country
7.1.1 Europe Silicon Carbide Manufacturing Equipment Sales by Country (2021-2026)
7.1.2 Europe Silicon Carbide Manufacturing Equipment Revenue by Country (2021-2026)
7.2 Europe Silicon Carbide Manufacturing Equipment Sales by Wafer Size (2021-2026)
7.3 Europe Silicon Carbide Manufacturing Equipment Sales by Application (2021-2026)
7.4 Germany
7.5 France
7.6 UK
7.7 Italy
7.8 Russia
8 Middle East & Africa
8.1 Middle East & Africa Silicon Carbide Manufacturing Equipment by Country
8.1.1 Middle East & Africa Silicon Carbide Manufacturing Equipment Sales by Country (2021-2026)
8.1.2 Middle East & Africa Silicon Carbide Manufacturing Equipment Revenue by Country (2021-2026)
8.2 Middle East & Africa Silicon Carbide Manufacturing Equipment Sales by Wafer Size (2021-2026)
8.3 Middle East & Africa Silicon Carbide Manufacturing Equipment Sales by Application (2021-2026)
8.4 Egypt
8.5 South Africa
8.6 Israel
8.7 Turkey
8.8 GCC Countries
9 Market Drivers, Challenges and Trends
9.1 Market Drivers & Growth Opportunities
9.2 Market Challenges & Risks
9.3 Industry Trends
10 Manufacturing Cost Structure Analysis
10.1 Raw Material and Suppliers
10.2 Manufacturing Cost Structure Analysis of Silicon Carbide Manufacturing Equipment
10.3 Manufacturing Process Analysis of Silicon Carbide Manufacturing Equipment
10.4 Industry Chain Structure of Silicon Carbide Manufacturing Equipment
11 Marketing, Distributors and Customer
11.1 Sales Channel
11.1.1 Direct Channels
11.1.2 Indirect Channels
11.2 Silicon Carbide Manufacturing Equipment Distributors
11.3 Silicon Carbide Manufacturing Equipment Customer
12 World Forecast Review for Silicon Carbide Manufacturing Equipment by Geographic Region
12.1 Global Silicon Carbide Manufacturing Equipment Market Size Forecast by Region
12.1.1 Global Silicon Carbide Manufacturing Equipment Forecast by Region (2027-2032)
12.1.2 Global Silicon Carbide Manufacturing Equipment Annual Revenue Forecast by Region (2027-2032)
12.2 Americas Forecast by Country (2027-2032)
12.3 APAC Forecast by Region (2027-2032)
12.4 Europe Forecast by Country (2027-2032)
12.5 Middle East & Africa Forecast by Country (2027-2032)
12.6 Global Silicon Carbide Manufacturing Equipment Forecast by Wafer Size (2027-2032)
12.7 Global Silicon Carbide Manufacturing Equipment Forecast by Application (2027-2032)
13 Key Players Analysis
13.1 Applied Materials
13.1.1 Applied Materials Company Information
13.1.2 Applied Materials Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.1.3 Applied Materials Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.1.4 Applied Materials Main Business Overview
13.1.5 Applied Materials Latest Developments
13.2 KLA SPTS
13.2.1 KLA SPTS Company Information
13.2.2 KLA SPTS Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.2.3 KLA SPTS Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.2.4 KLA SPTS Main Business Overview
13.2.5 KLA SPTS Latest Developments
13.3 Lam
13.3.1 Lam Company Information
13.3.2 Lam Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.3.3 Lam Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.3.4 Lam Main Business Overview
13.3.5 Lam Latest Developments
13.4 Tel
13.4.1 Tel Company Information
13.4.2 Tel Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.4.3 Tel Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.4.4 Tel Main Business Overview
13.4.5 Tel Latest Developments
13.5 Axcelis
13.5.1 Axcelis Company Information
13.5.2 Axcelis Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.5.3 Axcelis Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.5.4 Axcelis Main Business Overview
13.5.5 Axcelis Latest Developments
13.6 Centrotherm
13.6.1 Centrotherm Company Information
13.6.2 Centrotherm Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.6.3 Centrotherm Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.6.4 Centrotherm Main Business Overview
13.6.5 Centrotherm Latest Developments
13.7 ULVAC
13.7.1 ULVAC Company Information
13.7.2 ULVAC Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.7.3 ULVAC Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.7.4 ULVAC Main Business Overview
13.7.5 ULVAC Latest Developments
13.8 PVA TePla
13.8.1 PVA TePla Company Information
13.8.2 PVA TePla Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.8.3 PVA TePla Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.8.4 PVA TePla Main Business Overview
13.8.5 PVA TePla Latest Developments
13.9 NAURA
13.9.1 NAURA Company Information
13.9.2 NAURA Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.9.3 NAURA Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.9.4 NAURA Main Business Overview
13.9.5 NAURA Latest Developments
13.10 Kokusai
13.10.1 Kokusai Company Information
13.10.2 Kokusai Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.10.3 Kokusai Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.10.4 Kokusai Main Business Overview
13.10.5 Kokusai Latest Developments
13.11 SCREEN
13.11.1 SCREEN Company Information
13.11.2 SCREEN Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.11.3 SCREEN Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.11.4 SCREEN Main Business Overview
13.11.5 SCREEN Latest Developments
13.12 Sumitomo
13.12.1 Sumitomo Company Information
13.12.2 Sumitomo Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.12.3 Sumitomo Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.12.4 Sumitomo Main Business Overview
13.12.5 Sumitomo Latest Developments
13.13 Nissin Ion
13.13.1 Nissin Ion Company Information
13.13.2 Nissin Ion Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.13.3 Nissin Ion Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.13.4 Nissin Ion Main Business Overview
13.13.5 Nissin Ion Latest Developments
13.14 Oxford Instruments
13.14.1 Oxford Instruments Company Information
13.14.2 Oxford Instruments Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.14.3 Oxford Instruments Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.14.4 Oxford Instruments Main Business Overview
13.14.5 Oxford Instruments Latest Developments
13.15 ASML
13.15.1 ASML Company Information
13.15.2 ASML Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.15.3 ASML Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.15.4 ASML Main Business Overview
13.15.5 ASML Latest Developments
13.16 Nikon
13.16.1 Nikon Company Information
13.16.2 Nikon Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.16.3 Nikon Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.16.4 Nikon Main Business Overview
13.16.5 Nikon Latest Developments
13.17 Canon
13.17.1 Canon Company Information
13.17.2 Canon Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.17.3 Canon Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.17.4 Canon Main Business Overview
13.17.5 Canon Latest Developments
13.18 AIXTRON
13.18.1 AIXTRON Company Information
13.18.2 AIXTRON Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.18.3 AIXTRON Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.18.4 AIXTRON Main Business Overview
13.18.5 AIXTRON Latest Developments
13.19 ASM/LPE
13.19.1 ASM/LPE Company Information
13.19.2 ASM/LPE Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.19.3 ASM/LPE Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.19.4 ASM/LPE Main Business Overview
13.19.5 ASM/LPE Latest Developments
13.20 Accretech
13.20.1 Accretech Company Information
13.20.2 Accretech Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.20.3 Accretech Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.20.4 Accretech Main Business Overview
13.20.5 Accretech Latest Developments
13.21 DISCO
13.21.1 DISCO Company Information
13.21.2 DISCO Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.21.3 DISCO Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.21.4 DISCO Main Business Overview
13.21.5 DISCO Latest Developments
13.22 Okamoto
13.22.1 Okamoto Company Information
13.22.2 Okamoto Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.22.3 Okamoto Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.22.4 Okamoto Main Business Overview
13.22.5 Okamoto Latest Developments
13.23 Lasertec
13.23.1 Lasertec Company Information
13.23.2 Lasertec Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.23.3 Lasertec Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.23.4 Lasertec Main Business Overview
13.23.5 Lasertec Latest Developments
13.24 Advantest
13.24.1 Advantest Company Information
13.24.2 Advantest Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.24.3 Advantest Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.24.4 Advantest Main Business Overview
13.24.5 Advantest Latest Developments
13.25 Teradyne
13.25.1 Teradyne Company Information
13.25.2 Teradyne Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.25.3 Teradyne Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.25.4 Teradyne Main Business Overview
13.25.5 Teradyne Latest Developments
13.26 Crystal Growth & Energy Equipment Inc.
13.26.1 Crystal Growth & Energy Equipment Inc. Company Information
13.26.2 Crystal Growth & Energy Equipment Inc. Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.26.3 Crystal Growth & Energy Equipment Inc. Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.26.4 Crystal Growth & Energy Equipment Inc. Main Business Overview
13.26.5 Crystal Growth & Energy Equipment Inc. Latest Developments
13.27 Han's Laser Technology Industry
13.27.1 Han's Laser Technology Industry Company Information
13.27.2 Han's Laser Technology Industry Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.27.3 Han's Laser Technology Industry Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.27.4 Han's Laser Technology Industry Main Business Overview
13.27.5 Han's Laser Technology Industry Latest Developments
13.28 Beijing TSD Semiconductor Co., Ltd.
13.28.1 Beijing TSD Semiconductor Co., Ltd. Company Information
13.28.2 Beijing TSD Semiconductor Co., Ltd. Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.28.3 Beijing TSD Semiconductor Co., Ltd. Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.28.4 Beijing TSD Semiconductor Co., Ltd. Main Business Overview
13.28.5 Beijing TSD Semiconductor Co., Ltd. Latest Developments
13.29 Shenzhen Naso Tech
13.29.1 Shenzhen Naso Tech Company Information
13.29.2 Shenzhen Naso Tech Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.29.3 Shenzhen Naso Tech Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.29.4 Shenzhen Naso Tech Main Business Overview
13.29.5 Shenzhen Naso Tech Latest Developments
13.30 Beijing U-Precision Tech
13.30.1 Beijing U-Precision Tech Company Information
13.30.2 Beijing U-Precision Tech Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.30.3 Beijing U-Precision Tech Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.30.4 Beijing U-Precision Tech Main Business Overview
13.30.5 Beijing U-Precision Tech Latest Developments
13.31 AMIES Technology
13.31.1 AMIES Technology Company Information
13.31.2 AMIES Technology Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.31.3 AMIES Technology Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.31.4 AMIES Technology Main Business Overview
13.31.5 AMIES Technology Latest Developments
13.32 Gurui Semiconductor Equipment (Guangzhou)
13.32.1 Gurui Semiconductor Equipment (Guangzhou) Company Information
13.32.2 Gurui Semiconductor Equipment (Guangzhou) Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.32.3 Gurui Semiconductor Equipment (Guangzhou) Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.32.4 Gurui Semiconductor Equipment (Guangzhou) Main Business Overview
13.32.5 Gurui Semiconductor Equipment (Guangzhou) Latest Developments
13.33 Angkun Vision (Beijing) Technology
13.33.1 Angkun Vision (Beijing) Technology Company Information
13.33.2 Angkun Vision (Beijing) Technology Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
13.33.3 Angkun Vision (Beijing) Technology Silicon Carbide Manufacturing Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
13.33.4 Angkun Vision (Beijing) Technology Main Business Overview
13.33.5 Angkun Vision (Beijing) Technology Latest Developments
14 Research Findings and Conclusion

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List of Tables/Graphs

List of Tables
Table 1. Silicon Carbide Manufacturing Equipment Annual Sales CAGR by Geographic Region (2021, 2025 & 2032) & ($ millions)
Table 2. Silicon Carbide Manufacturing Equipment Annual Sales CAGR by Country/Region (2021, 2025 & 2032) & ($ millions)
Table 3. Major Players of 150mm SiC Equipment
Table 4. Major Players of 200mm SiC Equipment
Table 5. Major Players of Others
Table 6. Global Silicon Carbide Manufacturing Equipment Sales by Wafer Size (2021-2026) & (Units)
Table 7. Global Silicon Carbide Manufacturing Equipment Sales Market Share by Wafer Size (2021-2026)
Table 8. Global Silicon Carbide Manufacturing Equipment Revenue by Wafer Size (2021-2026) & ($ million)
Table 9. Global Silicon Carbide Manufacturing Equipment Revenue Market Share by Wafer Size (2021-2026)
Table 10. Global Silicon Carbide Manufacturing Equipment Sale Price by Wafer Size (2021-2026) & (US$/Unit)
Table 11. Major Players of SiC MOSFET
Table 12. Major Players of SiC Diode
Table 13. Major Players of Others
Table 14. Global Silicon Carbide Manufacturing Equipment Sales by Device Type (2021-2026) & (Units)
Table 15. Global Silicon Carbide Manufacturing Equipment Sales Market Share by Device Type (2021-2026)
Table 16. Global Silicon Carbide Manufacturing Equipment Revenue by Device Type (2021-2026) & ($ million)
Table 17. Global Silicon Carbide Manufacturing Equipment Revenue Market Share by Device Type (2021-2026)
Table 18. Global Silicon Carbide Manufacturing Equipment Sale Price by Device Type (2021-2026) & (US$/Unit)
Table 19. Major Players of SiC Epitaxy/HTCVD Equipment
Table 20. Major Players of SiC Thin-Film Deposition & Metallization
Table 21. Major Players of SiC Thermal Processing Equipment
Table 22. Major Players of SiC Thinning and CMP Equipment
Table 23. Major Players of SiC Plasma Etch & Ash/Strip
Table 24. Major Players of Wafer Cleaning & Surface Preparation
Table 25. Major Players of SiC Ion Implanters
Table 26. Major Players of Lithography & Track (Coater/Developer)
Table 27. Major Players of SiC Metrology and Inspection
Table 28. Global Silicon Carbide Manufacturing Equipment Sales by Equipment Type (2021-2026) & (Units)
Table 29. Global Silicon Carbide Manufacturing Equipment Sales Market Share by Equipment Type (2021-2026)
Table 30. Global Silicon Carbide Manufacturing Equipment Revenue by Equipment Type (2021-2026) & ($ million)
Table 31. Global Silicon Carbide Manufacturing Equipment Revenue Market Share by Equipment Type (2021-2026)
Table 32. Global Silicon Carbide Manufacturing Equipment Sale Price by Equipment Type (2021-2026) & (US$/Unit)
Table 33. Global Silicon Carbide Manufacturing Equipment Sale by Application (2021-2026) & (Units)
Table 34. Global Silicon Carbide Manufacturing Equipment Sale Market Share by Application (2021-2026)
Table 35. Global Silicon Carbide Manufacturing Equipment Revenue by Application (2021-2026) & ($ million)
Table 36. Global Silicon Carbide Manufacturing Equipment Revenue Market Share by Application (2021-2026)
Table 37. Global Silicon Carbide Manufacturing Equipment Sale Price by Application (2021-2026) & (US$/Unit)
Table 38. Global Silicon Carbide Manufacturing Equipment Sales by Company (2021-2026) & (Units)
Table 39. Global Silicon Carbide Manufacturing Equipment Sales Market Share by Company (2021-2026)
Table 40. Global Silicon Carbide Manufacturing Equipment Revenue by Company (2021-2026) & ($ millions)
Table 41. Global Silicon Carbide Manufacturing Equipment Revenue Market Share by Company (2021-2026)
Table 42. Global Silicon Carbide Manufacturing Equipment Sale Price by Company (2021-2026) & (US$/Unit)
Table 43. Key Manufacturers Silicon Carbide Manufacturing Equipment Producing Area Distribution and Sales Area
Table 44. Players Silicon Carbide Manufacturing Equipment Products Offered
Table 45. Silicon Carbide Manufacturing Equipment Concentration Ratio (CR3, CR5 and CR10) & (2024-2026)
Table 46. New Products and Potential Entrants
Table 47. Market M&A Activity & Strategy
Table 48. Global Silicon Carbide Manufacturing Equipment Sales by Geographic Region (2021-2026) & (Units)
Table 49. Global Silicon Carbide Manufacturing Equipment Sales Market Share Geographic Region (2021-2026)
Table 50. Global Silicon Carbide Manufacturing Equipment Revenue by Geographic Region (2021-2026) & ($ millions)
Table 51. Global Silicon Carbide Manufacturing Equipment Revenue Market Share by Geographic Region (2021-2026)
Table 52. Global Silicon Carbide Manufacturing Equipment Sales by Country/Region (2021-2026) & (Units)
Table 53. Global Silicon Carbide Manufacturing Equipment Sales Market Share by Country/Region (2021-2026)
Table 54. Global Silicon Carbide Manufacturing Equipment Revenue by Country/Region (2021-2026) & ($ millions)
Table 55. Global Silicon Carbide Manufacturing Equipment Revenue Market Share by Country/Region (2021-2026)
Table 56. Americas Silicon Carbide Manufacturing Equipment Sales by Country (2021-2026) & (Units)
Table 57. Americas Silicon Carbide Manufacturing Equipment Sales Market Share by Country (2021-2026)
Table 58. Americas Silicon Carbide Manufacturing Equipment Revenue by Country (2021-2026) & ($ millions)
Table 59. Americas Silicon Carbide Manufacturing Equipment Sales by Wafer Size (2021-2026) & (Units)
Table 60. Americas Silicon Carbide Manufacturing Equipment Sales by Application (2021-2026) & (Units)
Table 61. APAC Silicon Carbide Manufacturing Equipment Sales by Region (2021-2026) & (Units)
Table 62. APAC Silicon Carbide Manufacturing Equipment Sales Market Share by Region (2021-2026)
Table 63. APAC Silicon Carbide Manufacturing Equipment Revenue by Region (2021-2026) & ($ millions)
Table 64. APAC Silicon Carbide Manufacturing Equipment Sales by Wafer Size (2021-2026) & (Units)
Table 65. APAC Silicon Carbide Manufacturing Equipment Sales by Application (2021-2026) & (Units)
Table 66. Europe Silicon Carbide Manufacturing Equipment Sales by Country (2021-2026) & (Units)
Table 67. Europe Silicon Carbide Manufacturing Equipment Revenue by Country (2021-2026) & ($ millions)
Table 68. Europe Silicon Carbide Manufacturing Equipment Sales by Wafer Size (2021-2026) & (Units)
Table 69. Europe Silicon Carbide Manufacturing Equipment Sales by Application (2021-2026) & (Units)
Table 70. Middle East & Africa Silicon Carbide Manufacturing Equipment Sales by Country (2021-2026) & (Units)
Table 71. Middle East & Africa Silicon Carbide Manufacturing Equipment Revenue Market Share by Country (2021-2026)
Table 72. Middle East & Africa Silicon Carbide Manufacturing Equipment Sales by Wafer Size (2021-2026) & (Units)
Table 73. Middle East & Africa Silicon Carbide Manufacturing Equipment Sales by Application (2021-2026) & (Units)
Table 74. Key Market Drivers & Growth Opportunities of Silicon Carbide Manufacturing Equipment
Table 75. Key Market Challenges & Risks of Silicon Carbide Manufacturing Equipment
Table 76. Key Industry Trends of Silicon Carbide Manufacturing Equipment
Table 77. Silicon Carbide Manufacturing Equipment Raw Material
Table 78. Key Suppliers of Raw Materials
Table 79. Silicon Carbide Manufacturing Equipment Distributors List
Table 80. Silicon Carbide Manufacturing Equipment Customer List
Table 81. Global Silicon Carbide Manufacturing Equipment Sales Forecast by Region (2027-2032) & (Units)
Table 82. Global Silicon Carbide Manufacturing Equipment Revenue Forecast by Region (2027-2032) & ($ millions)
Table 83. Americas Silicon Carbide Manufacturing Equipment Sales Forecast by Country (2027-2032) & (Units)
Table 84. Americas Silicon Carbide Manufacturing Equipment Annual Revenue Forecast by Country (2027-2032) & ($ millions)
Table 85. APAC Silicon Carbide Manufacturing Equipment Sales Forecast by Region (2027-2032) & (Units)
Table 86. APAC Silicon Carbide Manufacturing Equipment Annual Revenue Forecast by Region (2027-2032) & ($ millions)
Table 87. Europe Silicon Carbide Manufacturing Equipment Sales Forecast by Country (2027-2032) & (Units)
Table 88. Europe Silicon Carbide Manufacturing Equipment Revenue Forecast by Country (2027-2032) & ($ millions)
Table 89. Middle East & Africa Silicon Carbide Manufacturing Equipment Sales Forecast by Country (2027-2032) & (Units)
Table 90. Middle East & Africa Silicon Carbide Manufacturing Equipment Revenue Forecast by Country (2027-2032) & ($ millions)
Table 91. Global Silicon Carbide Manufacturing Equipment Sales Forecast by Wafer Size (2027-2032) & (Units)
Table 92. Global Silicon Carbide Manufacturing Equipment Revenue Forecast by Wafer Size (2027-2032) & ($ millions)
Table 93. Global Silicon Carbide Manufacturing Equipment Sales Forecast by Application (2027-2032) & (Units)
Table 94. Global Silicon Carbide Manufacturing Equipment Revenue Forecast by Application (2027-2032) & ($ millions)
Table 95. Applied Materials Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 96. Applied Materials Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 97. Applied Materials Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 98. Applied Materials Main Business
Table 99. Applied Materials Latest Developments
Table 100. KLA SPTS Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 101. KLA SPTS Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 102. KLA SPTS Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 103. KLA SPTS Main Business
Table 104. KLA SPTS Latest Developments
Table 105. Lam Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 106. Lam Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 107. Lam Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 108. Lam Main Business
Table 109. Lam Latest Developments
Table 110. Tel Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 111. Tel Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 112. Tel Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 113. Tel Main Business
Table 114. Tel Latest Developments
Table 115. Axcelis Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 116. Axcelis Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 117. Axcelis Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 118. Axcelis Main Business
Table 119. Axcelis Latest Developments
Table 120. Centrotherm Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 121. Centrotherm Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 122. Centrotherm Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 123. Centrotherm Main Business
Table 124. Centrotherm Latest Developments
Table 125. ULVAC Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 126. ULVAC Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 127. ULVAC Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 128. ULVAC Main Business
Table 129. ULVAC Latest Developments
Table 130. PVA TePla Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 131. PVA TePla Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 132. PVA TePla Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 133. PVA TePla Main Business
Table 134. PVA TePla Latest Developments
Table 135. NAURA Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 136. NAURA Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 137. NAURA Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 138. NAURA Main Business
Table 139. NAURA Latest Developments
Table 140. Kokusai Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 141. Kokusai Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 142. Kokusai Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 143. Kokusai Main Business
Table 144. Kokusai Latest Developments
Table 145. SCREEN Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 146. SCREEN Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 147. SCREEN Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 148. SCREEN Main Business
Table 149. SCREEN Latest Developments
Table 150. Sumitomo Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 151. Sumitomo Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 152. Sumitomo Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 153. Sumitomo Main Business
Table 154. Sumitomo Latest Developments
Table 155. Nissin Ion Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 156. Nissin Ion Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 157. Nissin Ion Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 158. Nissin Ion Main Business
Table 159. Nissin Ion Latest Developments
Table 160. Oxford Instruments Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 161. Oxford Instruments Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 162. Oxford Instruments Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 163. Oxford Instruments Main Business
Table 164. Oxford Instruments Latest Developments
Table 165. ASML Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 166. ASML Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 167. ASML Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 168. ASML Main Business
Table 169. ASML Latest Developments
Table 170. Nikon Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 171. Nikon Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 172. Nikon Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 173. Nikon Main Business
Table 174. Nikon Latest Developments
Table 175. Canon Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 176. Canon Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 177. Canon Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 178. Canon Main Business
Table 179. Canon Latest Developments
Table 180. AIXTRON Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 181. AIXTRON Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 182. AIXTRON Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 183. AIXTRON Main Business
Table 184. AIXTRON Latest Developments
Table 185. ASM/LPE Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 186. ASM/LPE Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 187. ASM/LPE Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 188. ASM/LPE Main Business
Table 189. ASM/LPE Latest Developments
Table 190. Accretech Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 191. Accretech Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 192. Accretech Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 193. Accretech Main Business
Table 194. Accretech Latest Developments
Table 195. DISCO Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 196. DISCO Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 197. DISCO Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 198. DISCO Main Business
Table 199. DISCO Latest Developments
Table 200. Okamoto Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 201. Okamoto Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 202. Okamoto Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 203. Okamoto Main Business
Table 204. Okamoto Latest Developments
Table 205. Lasertec Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 206. Lasertec Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 207. Lasertec Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 208. Lasertec Main Business
Table 209. Lasertec Latest Developments
Table 210. Advantest Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 211. Advantest Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 212. Advantest Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 213. Advantest Main Business
Table 214. Advantest Latest Developments
Table 215. Teradyne Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 216. Teradyne Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 217. Teradyne Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 218. Teradyne Main Business
Table 219. Teradyne Latest Developments
Table 220. Crystal Growth & Energy Equipment Inc. Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 221. Crystal Growth & Energy Equipment Inc. Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 222. Crystal Growth & Energy Equipment Inc. Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 223. Crystal Growth & Energy Equipment Inc. Main Business
Table 224. Crystal Growth & Energy Equipment Inc. Latest Developments
Table 225. Han's Laser Technology Industry Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 226. Han's Laser Technology Industry Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 227. Han's Laser Technology Industry Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 228. Han's Laser Technology Industry Main Business
Table 229. Han's Laser Technology Industry Latest Developments
Table 230. Beijing TSD Semiconductor Co., Ltd. Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 231. Beijing TSD Semiconductor Co., Ltd. Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 232. Beijing TSD Semiconductor Co., Ltd. Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 233. Beijing TSD Semiconductor Co., Ltd. Main Business
Table 234. Beijing TSD Semiconductor Co., Ltd. Latest Developments
Table 235. Shenzhen Naso Tech Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 236. Shenzhen Naso Tech Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 237. Shenzhen Naso Tech Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 238. Shenzhen Naso Tech Main Business
Table 239. Shenzhen Naso Tech Latest Developments
Table 240. Beijing U-Precision Tech Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 241. Beijing U-Precision Tech Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 242. Beijing U-Precision Tech Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 243. Beijing U-Precision Tech Main Business
Table 244. Beijing U-Precision Tech Latest Developments
Table 245. AMIES Technology Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 246. AMIES Technology Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 247. AMIES Technology Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 248. AMIES Technology Main Business
Table 249. AMIES Technology Latest Developments
Table 250. Gurui Semiconductor Equipment (Guangzhou) Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 251. Gurui Semiconductor Equipment (Guangzhou) Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 252. Gurui Semiconductor Equipment (Guangzhou) Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 253. Gurui Semiconductor Equipment (Guangzhou) Main Business
Table 254. Gurui Semiconductor Equipment (Guangzhou) Latest Developments
Table 255. Angkun Vision (Beijing) Technology Basic Information, Silicon Carbide Manufacturing Equipment Manufacturing Base, Sales Area and Its Competitors
Table 256. Angkun Vision (Beijing) Technology Silicon Carbide Manufacturing Equipment Product Portfolios and Specifications
Table 257. Angkun Vision (Beijing) Technology Silicon Carbide Manufacturing Equipment Sales (Units), Revenue ($ Million), Price (US$/Unit) and Gross Margin (2021-2026)
Table 258. Angkun Vision (Beijing) Technology Main Business
Table 259. Angkun Vision (Beijing) Technology Latest Developments


List of Figures
Figure 1. Picture of Silicon Carbide Manufacturing Equipment
Figure 2. Silicon Carbide Manufacturing Equipment Report Years Considered
Figure 3. Research Objectives
Figure 4. Research Methodology
Figure 5. Research Process and Data Source
Figure 6. Global Silicon Carbide Manufacturing Equipment Sales Growth Rate 2021-2032 (Units)
Figure 7. Global Silicon Carbide Manufacturing Equipment Revenue Growth Rate 2021-2032 ($ millions)
Figure 8. Silicon Carbide Manufacturing Equipment Sales by Geographic Region (2021, 2025 & 2032) & ($ millions)
Figure 9. Silicon Carbide Manufacturing Equipment Sales Market Share by Country/Region (2025)
Figure 10. Silicon Carbide Manufacturing Equipment Sales Market Share by Country/Region (2021, 2025 & 2032)
Figure 11. Product Picture of 150mm SiC Equipment
Figure 12. Product Picture of 200mm SiC Equipment
Figure 13. Product Picture of Others
Figure 14. Global Silicon Carbide Manufacturing Equipment Sales Market Share by Wafer Size in 2026
Figure 15. Global Silicon Carbide Manufacturing Equipment Revenue Market Share by Wafer Size (2021-2026)
Figure 16. Product Picture of SiC MOSFET
Figure 17. Product Picture of SiC Diode
Figure 18. Product Picture of Others
Figure 19. Global Silicon Carbide Manufacturing Equipment Sales Market Share by Device Type in 2026
Figure 20. Global Silicon Carbide Manufacturing Equipment Revenue Market Share by Device Type (2021-2026)
Figure 21. Product Picture of SiC Epitaxy/HTCVD Equipment
Figure 22. Product Picture of SiC Thin-Film Deposition & Metallization
Figure 23. Product Picture of SiC Thermal Processing Equipment
Figure 24. Product Picture of SiC Thinning and CMP Equipment
Figure 25. Product Picture of SiC Plasma Etch & Ash/Strip
Figure 26. Product Picture of Wafer Cleaning & Surface Preparation
Figure 27. Product Picture of SiC Ion Implanters
Figure 28. Product Picture of Lithography & Track (Coater/Developer)
Figure 29. Product Picture of SiC Metrology and Inspection
Figure 30. Global Silicon Carbide Manufacturing Equipment Sales Market Share by Equipment Type in 2026
Figure 31. Global Silicon Carbide Manufacturing Equipment Revenue Market Share by Equipment Type (2021-2026)
Figure 32. Silicon Carbide Manufacturing Equipment Consumed in SiC Substrate Manufacturing
Figure 33. Global Silicon Carbide Manufacturing Equipment Market: SiC Substrate Manufacturing (2021-2026) & (Units)
Figure 34. Silicon Carbide Manufacturing Equipment Consumed in SiC Epitaxy Manufacturing
Figure 35. Global Silicon Carbide Manufacturing Equipment Market: SiC Epitaxy Manufacturing (2021-2026) & (Units)
Figure 36. Silicon Carbide Manufacturing Equipment Consumed in SiC Device Manufacturing
Figure 37. Global Silicon Carbide Manufacturing Equipment Market: SiC Device Manufacturing (2021-2026) & (Units)
Figure 38. Global Silicon Carbide Manufacturing Equipment Sale Market Share by Application (2025)
Figure 39. Global Silicon Carbide Manufacturing Equipment Revenue Market Share by Application in 2026
Figure 40. Silicon Carbide Manufacturing Equipment Sales by Company in 2026 (Units)
Figure 41. Global Silicon Carbide Manufacturing Equipment Sales Market Share by Company in 2026
Figure 42. Silicon Carbide Manufacturing Equipment Revenue by Company in 2026 ($ millions)
Figure 43. Global Silicon Carbide Manufacturing Equipment Revenue Market Share by Company in 2026
Figure 44. Global Silicon Carbide Manufacturing Equipment Sales Market Share by Geographic Region (2021-2026)
Figure 45. Global Silicon Carbide Manufacturing Equipment Revenue Market Share by Geographic Region in 2026
Figure 46. Americas Silicon Carbide Manufacturing Equipment Sales 2021-2026 (Units)
Figure 47. Americas Silicon Carbide Manufacturing Equipment Revenue 2021-2026 ($ millions)
Figure 48. APAC Silicon Carbide Manufacturing Equipment Sales 2021-2026 (Units)
Figure 49. APAC Silicon Carbide Manufacturing Equipment Revenue 2021-2026 ($ millions)
Figure 50. Europe Silicon Carbide Manufacturing Equipment Sales 2021-2026 (Units)
Figure 51. Europe Silicon Carbide Manufacturing Equipment Revenue 2021-2026 ($ millions)
Figure 52. Middle East & Africa Silicon Carbide Manufacturing Equipment Sales 2021-2026 (Units)
Figure 53. Middle East & Africa Silicon Carbide Manufacturing Equipment Revenue 2021-2026 ($ millions)
Figure 54. Americas Silicon Carbide Manufacturing Equipment Sales Market Share by Country in 2026
Figure 55. Americas Silicon Carbide Manufacturing Equipment Revenue Market Share by Country (2021-2026)
Figure 56. Americas Silicon Carbide Manufacturing Equipment Sales Market Share by Wafer Size (2021-2026)
Figure 57. Americas Silicon Carbide Manufacturing Equipment Sales Market Share by Application (2021-2026)
Figure 58. United States Silicon Carbide Manufacturing Equipment Revenue Growth 2021-2026 ($ millions)
Figure 59. Canada Silicon Carbide Manufacturing Equipment Revenue Growth 2021-2026 ($ millions)
Figure 60. Mexico Silicon Carbide Manufacturing Equipment Revenue Growth 2021-2026 ($ millions)
Figure 61. Brazil Silicon Carbide Manufacturing Equipment Revenue Growth 2021-2026 ($ millions)
Figure 62. APAC Silicon Carbide Manufacturing Equipment Sales Market Share by Region in 2026
Figure 63. APAC Silicon Carbide Manufacturing Equipment Revenue Market Share by Region (2021-2026)
Figure 64. APAC Silicon Carbide Manufacturing Equipment Sales Market Share by Wafer Size (2021-2026)
Figure 65. APAC Silicon Carbide Manufacturing Equipment Sales Market Share by Application (2021-2026)
Figure 66. China Silicon Carbide Manufacturing Equipment Revenue Growth 2021-2026 ($ millions)
Figure 67. Japan Silicon Carbide Manufacturing Equipment Revenue Growth 2021-2026 ($ millions)
Figure 68. South Korea Silicon Carbide Manufacturing Equipment Revenue Growth 2021-2026 ($ millions)
Figure 69. Southeast Asia Silicon Carbide Manufacturing Equipment Revenue Growth 2021-2026 ($ millions)
Figure 70. India Silicon Carbide Manufacturing Equipment Revenue Growth 2021-2026 ($ millions)
Figure 71. Australia Silicon Carbide Manufacturing Equipment Revenue Growth 2021-2026 ($ millions)
Figure 72. China Taiwan Silicon Carbide Manufacturing Equipment Revenue Growth 2021-2026 ($ millions)
Figure 73. Europe Silicon Carbide Manufacturing Equipment Sales Market Share by Country in 2026
Figure 74. Europe Silicon Carbide Manufacturing Equipment Revenue Market Share by Country (2021-2026)
Figure 75. Europe Silicon Carbide Manufacturing Equipment Sales Market Share by Wafer Size (2021-2026)
Figure 76. Europe Silicon Carbide Manufacturing Equipment Sales Market Share by Application (2021-2026)
Figure 77. Germany Silicon Carbide Manufacturing Equipment Revenue Growth 2021-2026 ($ millions)
Figure 78. France Silicon Carbide Manufacturing Equipment Revenue Growth 2021-2026 ($ millions)
Figure 79. UK Silicon Carbide Manufacturing Equipment Revenue Growth 2021-2026 ($ millions)
Figure 80. Italy Silicon Carbide Manufacturing Equipment Revenue Growth 2021-2026 ($ millions)
Figure 81. Russia Silicon Carbide Manufacturing Equipment Revenue Growth 2021-2026 ($ millions)
Figure 82. Middle East & Africa Silicon Carbide Manufacturing Equipment Sales Market Share by Country (2021-2026)
Figure 83. Middle East & Africa Silicon Carbide Manufacturing Equipment Sales Market Share by Wafer Size (2021-2026)
Figure 84. Middle East & Africa Silicon Carbide Manufacturing Equipment Sales Market Share by Application (2021-2026)
Figure 85. Egypt Silicon Carbide Manufacturing Equipment Revenue Growth 2021-2026 ($ millions)
Figure 86. South Africa Silicon Carbide Manufacturing Equipment Revenue Growth 2021-2026 ($ millions)
Figure 87. Israel Silicon Carbide Manufacturing Equipment Revenue Growth 2021-2026 ($ millions)
Figure 88. Turkey Silicon Carbide Manufacturing Equipment Revenue Growth 2021-2026 ($ millions)
Figure 89. GCC Countries Silicon Carbide Manufacturing Equipment Revenue Growth 2021-2026 ($ millions)
Figure 90. Manufacturing Cost Structure Analysis of Silicon Carbide Manufacturing Equipment in 2026
Figure 91. Manufacturing Process Analysis of Silicon Carbide Manufacturing Equipment
Figure 92. Industry Chain Structure of Silicon Carbide Manufacturing Equipment
Figur