Summary

The global market for Mass Flow Controller was estimated to be worth US$ 1335 million in 2024 and is forecast to a readjusted size of US$ 2347 million by 2031 with a CAGR of 7.7% during the forecast period 2025-2031.
This report provides a comprehensive assessment of recent tariff adjustments and international strategic countermeasures on Mass Flow Controller cross-border industrial footprints, capital allocation patterns, regional economic interdependencies, and supply chain reconfigurations.
A Mass Flow Controller (MFC) is a precision device used to measure and control the mass flow rate of gases, and sometimes liquids, in real time. Unlike volumetric flow meters, an MFC regulates flow based on mass, making it independent of temperature and pressure variations, which ensures high accuracy and repeatability. It typically consists of a flow sensor, a control valve, and a feedback control system that continuously adjusts the valve to maintain the desired setpoint. MFCs are widely used in applications requiring precise fluid control, including semiconductor manufacturing, chemical processing, pharmaceuticals, laboratory experiments, gas mixing, and industrial automation, where stable and accurate flow is critical for process efficiency, safety, and product quality.

In 2024, global Mass Flow Controller production reached approximately 1.3 million units , with an average global market price of around US$ 1,000 per unit.
The Mass Flow Controller (MFC) market is poised for substantial growth over the coming years, driven by the increasing demand for precise gas and liquid flow measurement and control across a wide array of high-tech and industrial applications, including semiconductor fabrication, photovoltaic and display panel manufacturing, chemical and pharmaceutical processing, energy production, environmental monitoring, and laboratory research; in semiconductor manufacturing, the adoption of advanced processes such as atomic layer deposition (ALD), chemical vapor deposition (CVD), and etching requires highly accurate and repeatable gas delivery systems, which are provided by MFCs to ensure wafer uniformity and yield, while the growing solar energy and LED markets further drive the need for precise gas flow in thin-film deposition and material synthesis; in pharmaceuticals and chemicals, stringent quality control standards and regulatory compliance necessitate accurate dosing and mixing of reactive or specialty gases, where MFCs ensure both safety and process reliability; additionally, the emergence of microelectronics, MEMS devices, and high-purity applications has elevated the demand for low-flow and ultra-precise MFCs capable of handling corrosive, toxic, or high-purity gases; the market is further bolstered by trends in automation, Industry 4.0, and smart manufacturing, where integrated MFCs with digital communication protocols (such as RS-485, EtherCAT, and Fieldbus) allow for real-time process monitoring, remote control, and predictive maintenance, increasing operational efficiency and reducing downtime; technological innovations in compact, high-response, and multifunctional MFCs expand their applicability into new industrial segments, while geographic expansion in Asia-Pacific, particularly in China, South Korea, and India, driven by electronics, chemical, and energy industries, provides additional growth opportunities; combined with increasing investments in research and development, rising demand for energy-efficient and environmentally compliant processes, and continuous improvement in accuracy, repeatability, and reliability, the global mass flow controller market is expected to experience robust long-term expansion, making it an attractive sector for equipment manufacturers, process integrators, and investors seeking to capitalize on the rising complexity and precision requirements of modern industrial and laboratory processes.

This report aims to provide a comprehensive presentation of the global market for Mass Flow Controller, focusing on the total sales volume, sales revenue, price, key companies market share and ranking, together with an analysis of Mass Flow Controller by region & country, by Type, and by Application.
The Mass Flow Controller market size, estimations, and forecasts are provided in terms of sales volume (K Units) and sales revenue ($ millions), considering 2024 as the base year, with history and forecast data for the period from 2020 to 2031. With both quantitative and qualitative analysis, to help readers develop business/growth strategies, assess the market competitive situation, analyze their position in the current marketplace, and make informed business decisions regarding Mass Flow Controller.

Market Segmentation
By Company
HORIBA
Bronkhorst
Beijing Aurasky Electronics Co., Ltd
MKS Instruments
Brooks
Bürkert
TOKYO KEISO CO.,LTD
Sensirion
AZBIL
Sierra Instruments
Teledyne
Omega
Hitachi Metals, Ltd
Parker Hannifin
Kofloc
ACCU
Fujikin
Pivotal Systems
MKP
Alicat
Lintec
AXETRIS
Vögtlin Instruments GmbH
ACE
Segment by Type
Digital Type
Analog Type
Segment by Technology
Thermal Type
Differential Pressure Type
Segment by Application
Semiconductor Manufacturing
FPD Industry
Vacuum Coating
General Industry
Photovoltaic Industry
Fuel Cell
Analytical Instrument
Scientific Research
Others
By Region
North America
United States
Canada
Asia-Pacific
China
Japan
South Korea
Southeast Asia
India
Australia
Rest of Asia-Pacific
Europe
Germany
France
U.K.
Italy
Netherlands
Nordic Countries
Rest of Europe
Latin America
Mexico
Brazil
Rest of Latin America
Middle East & Africa
Turkey
Saudi Arabia
UAE
Rest of MEA
Chapter Outline
Chapter 1: Introduces the report scope of the report, global total market size (value, volume and price). This chapter also provides the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by manufacturers in the industry, and the analysis of relevant policies in the industry.
Chapter 2: Detailed analysis of Mass Flow Controller manufacturers competitive landscape, price, sales and revenue market share, latest development plan, merger, and acquisition information, etc.
Chapter 3: Provides the analysis of various market segments by Type, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different market segments.
Chapter 4: Provides the analysis of various market segments by Application, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.
Chapter 5: Sales, revenue of Mass Flow Controller in regional level. It provides a quantitative analysis of the market size and development potential of each region and introduces the market development, future development prospects, market space, and market size of each country in the world.
Chapter 6: Sales, revenue of Mass Flow Controller in country level. It provides sigmate data by Type, and by Application for each country/region.
Chapter 7: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product sales, revenue, price, gross margin, product introduction, recent development, etc.
Chapter 8: Analysis of industrial chain, including the upstream and downstream of the industry.
Chapter 9: Conclusion.

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Table of Contents

1 Market Overview
1.1 Mass Flow Controller Product Introduction
1.2 Global Mass Flow Controller Market Size Forecast
1.2.1 Global Mass Flow Controller Sales Value (2020-2031)
1.2.2 Global Mass Flow Controller Sales Volume (2020-2031)
1.2.3 Global Mass Flow Controller Sales Price (2020-2031)
1.3 Mass Flow Controller Market Trends & Drivers
1.3.1 Mass Flow Controller Industry Trends
1.3.2 Mass Flow Controller Market Drivers & Opportunity
1.3.3 Mass Flow Controller Market Challenges
1.3.4 Mass Flow Controller Market Restraints
1.4 Assumptions and Limitations
1.5 Study Objectives
1.6 Years Considered
2 Competitive Analysis by Company
2.1 Global Mass Flow Controller Players Revenue Ranking (2024)
2.2 Global Mass Flow Controller Revenue by Company (2020-2025)
2.3 Global Mass Flow Controller Players Sales Volume Ranking (2024)
2.4 Global Mass Flow Controller Sales Volume by Company Players (2020-2025)
2.5 Global Mass Flow Controller Average Price by Company (2020-2025)
2.6 Key Manufacturers Mass Flow Controller Manufacturing Base and Headquarters
2.7 Key Manufacturers Mass Flow Controller Product Offered
2.8 Key Manufacturers Time to Begin Mass Production of Mass Flow Controller
2.9 Mass Flow Controller Market Competitive Analysis
2.9.1 Mass Flow Controller Market Concentration Rate (2020-2025)
2.9.2 Global 5 and 10 Largest Manufacturers by Mass Flow Controller Revenue in 2024
2.9.3 Global Top Manufacturers by Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Revenue in Mass Flow Controller as of 2024)
2.10 Mergers & Acquisitions, Expansion
3 Segmentation by Type
3.1 Introduction by Type
3.1.1 Digital Type
3.1.2 Analog Type
3.2 Global Mass Flow Controller Sales Value by Type
3.2.1 Global Mass Flow Controller Sales Value by Type (2020 VS 2024 VS 2031)
3.2.2 Global Mass Flow Controller Sales Value, by Type (2020-2031)
3.2.3 Global Mass Flow Controller Sales Value, by Type (%) (2020-2031)
3.3 Global Mass Flow Controller Sales Volume by Type
3.3.1 Global Mass Flow Controller Sales Volume by Type (2020 VS 2024 VS 2031)
3.3.2 Global Mass Flow Controller Sales Volume, by Type (2020-2031)
3.3.3 Global Mass Flow Controller Sales Volume, by Type (%) (2020-2031)
3.4 Global Mass Flow Controller Average Price by Type (2020-2031)
4 Segmentation by Technology
4.1 Introduction by Technology
4.1.1 Thermal Type
4.1.2 Differential Pressure Type
4.2 Global Mass Flow Controller Sales Value by Technology
4.2.1 Global Mass Flow Controller Sales Value by Technology (2020 VS 2024 VS 2031)
4.2.2 Global Mass Flow Controller Sales Value, by Technology (2020-2031)
4.2.3 Global Mass Flow Controller Sales Value, by Technology (%) (2020-2031)
4.3 Global Mass Flow Controller Sales Volume by Technology
4.3.1 Global Mass Flow Controller Sales Volume by Technology (2020 VS 2024 VS 2031)
4.3.2 Global Mass Flow Controller Sales Volume, by Technology (2020-2031)
4.3.3 Global Mass Flow Controller Sales Volume, by Technology (%) (2020-2031)
4.4 Global Mass Flow Controller Average Price by Technology (2020-2031)
5 Segmentation by Application
5.1 Introduction by Application
5.1.1 Semiconductor Manufacturing
5.1.2 FPD Industry
5.1.3 Vacuum Coating
5.1.4 General Industry
5.1.5 Photovoltaic Industry
5.1.6 Fuel Cell
5.1.7 Analytical Instrument
5.1.8 Scientific Research
5.1.9 Others
5.2 Global Mass Flow Controller Sales Value by Application
5.2.1 Global Mass Flow Controller Sales Value by Application (2020 VS 2024 VS 2031)
5.2.2 Global Mass Flow Controller Sales Value, by Application (2020-2031)
5.2.3 Global Mass Flow Controller Sales Value, by Application (%) (2020-2031)
5.3 Global Mass Flow Controller Sales Volume by Application
5.3.1 Global Mass Flow Controller Sales Volume by Application (2020 VS 2024 VS 2031)
5.3.2 Global Mass Flow Controller Sales Volume, by Application (2020-2031)
5.3.3 Global Mass Flow Controller Sales Volume, by Application (%) (2020-2031)
5.4 Global Mass Flow Controller Average Price by Application (2020-2031)
6 Segmentation by Region
6.1 Global Mass Flow Controller Sales Value by Region
6.1.1 Global Mass Flow Controller Sales Value by Region: 2020 VS 2024 VS 2031
6.1.2 Global Mass Flow Controller Sales Value by Region (2020-2025)
6.1.3 Global Mass Flow Controller Sales Value by Region (2026-2031)
6.1.4 Global Mass Flow Controller Sales Value by Region (%), (2020-2031)
6.2 Global Mass Flow Controller Sales Volume by Region
6.2.1 Global Mass Flow Controller Sales Volume by Region: 2020 VS 2024 VS 2031
6.2.2 Global Mass Flow Controller Sales Volume by Region (2020-2025)
6.2.3 Global Mass Flow Controller Sales Volume by Region (2026-2031)
6.2.4 Global Mass Flow Controller Sales Volume by Region (%), (2020-2031)
6.3 Global Mass Flow Controller Average Price by Region (2020-2031)
6.4 North America
6.4.1 North America Mass Flow Controller Sales Value, 2020-2031
6.4.2 North America Mass Flow Controller Sales Value by Country (%), 2024 VS 2031
6.5 Europe
6.5.1 Europe Mass Flow Controller Sales Value, 2020-2031
6.5.2 Europe Mass Flow Controller Sales Value by Country (%), 2024 VS 2031
6.6 Asia Pacific
6.6.1 Asia Pacific Mass Flow Controller Sales Value, 2020-2031
6.6.2 Asia Pacific Mass Flow Controller Sales Value by Region (%), 2024 VS 2031
6.7 South America
6.7.1 South America Mass Flow Controller Sales Value, 2020-2031
6.7.2 South America Mass Flow Controller Sales Value by Country (%), 2024 VS 2031
6.8 Middle East & Africa
6.8.1 Middle East & Africa Mass Flow Controller Sales Value, 2020-2031
6.8.2 Middle East & Africa Mass Flow Controller Sales Value by Country (%), 2024 VS 2031
7 Segmentation by Key Countries/Regions
7.1 Key Countries/Regions Mass Flow Controller Sales Value Growth Trends, 2020 VS 2024 VS 2031
7.2 Key Countries/Regions Mass Flow Controller Sales Value and Sales Volume
7.2.1 Key Countries/Regions Mass Flow Controller Sales Value, 2020-2031
7.2.2 Key Countries/Regions Mass Flow Controller Sales Volume, 2020-2031
7.3 United States
7.3.1 United States Mass Flow Controller Sales Value, 2020-2031
7.3.2 United States Mass Flow Controller Sales Value by Type (%), 2024 VS 2031
7.3.3 United States Mass Flow Controller Sales Value by Application, 2024 VS 2031
7.4 Europe
7.4.1 Europe Mass Flow Controller Sales Value, 2020-2031
7.4.2 Europe Mass Flow Controller Sales Value by Type (%), 2024 VS 2031
7.4.3 Europe Mass Flow Controller Sales Value by Application, 2024 VS 2031
7.5 China
7.5.1 China Mass Flow Controller Sales Value, 2020-2031
7.5.2 China Mass Flow Controller Sales Value by Type (%), 2024 VS 2031
7.5.3 China Mass Flow Controller Sales Value by Application, 2024 VS 2031
7.6 Japan
7.6.1 Japan Mass Flow Controller Sales Value, 2020-2031
7.6.2 Japan Mass Flow Controller Sales Value by Type (%), 2024 VS 2031
7.6.3 Japan Mass Flow Controller Sales Value by Application, 2024 VS 2031
7.7 South Korea
7.7.1 South Korea Mass Flow Controller Sales Value, 2020-2031
7.7.2 South Korea Mass Flow Controller Sales Value by Type (%), 2024 VS 2031
7.7.3 South Korea Mass Flow Controller Sales Value by Application, 2024 VS 2031
7.8 Southeast Asia
7.8.1 Southeast Asia Mass Flow Controller Sales Value, 2020-2031
7.8.2 Southeast Asia Mass Flow Controller Sales Value by Type (%), 2024 VS 2031
7.8.3 Southeast Asia Mass Flow Controller Sales Value by Application, 2024 VS 2031
7.9 India
7.9.1 India Mass Flow Controller Sales Value, 2020-2031
7.9.2 India Mass Flow Controller Sales Value by Type (%), 2024 VS 2031
7.9.3 India Mass Flow Controller Sales Value by Application, 2024 VS 2031
8 Company Profiles
8.1 HORIBA
8.1.1 HORIBA Company Information
8.1.2 HORIBA Introduction and Business Overview
8.1.3 HORIBA Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
8.1.4 HORIBA Mass Flow Controller Product Offerings
8.1.5 HORIBA Recent Development
8.2 Bronkhorst
8.2.1 Bronkhorst Company Information
8.2.2 Bronkhorst Introduction and Business Overview
8.2.3 Bronkhorst Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
8.2.4 Bronkhorst Mass Flow Controller Product Offerings
8.2.5 Bronkhorst Recent Development
8.3 Beijing Aurasky Electronics Co., Ltd
8.3.1 Beijing Aurasky Electronics Co., Ltd Company Information
8.3.2 Beijing Aurasky Electronics Co., Ltd Introduction and Business Overview
8.3.3 Beijing Aurasky Electronics Co., Ltd Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
8.3.4 Beijing Aurasky Electronics Co., Ltd Mass Flow Controller Product Offerings
8.3.5 Beijing Aurasky Electronics Co., Ltd Recent Development
8.4 MKS Instruments
8.4.1 MKS Instruments Company Information
8.4.2 MKS Instruments Introduction and Business Overview
8.4.3 MKS Instruments Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
8.4.4 MKS Instruments Mass Flow Controller Product Offerings
8.4.5 MKS Instruments Recent Development
8.5 Brooks
8.5.1 Brooks Company Information
8.5.2 Brooks Introduction and Business Overview
8.5.3 Brooks Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
8.5.4 Brooks Mass Flow Controller Product Offerings
8.5.5 Brooks Recent Development
8.6 Bürkert
8.6.1 Bürkert Company Information
8.6.2 Bürkert Introduction and Business Overview
8.6.3 Bürkert Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
8.6.4 Bürkert Mass Flow Controller Product Offerings
8.6.5 Bürkert Recent Development
8.7 TOKYO KEISO CO.,LTD
8.7.1 TOKYO KEISO CO.,LTD Company Information
8.7.2 TOKYO KEISO CO.,LTD Introduction and Business Overview
8.7.3 TOKYO KEISO CO.,LTD Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
8.7.4 TOKYO KEISO CO.,LTD Mass Flow Controller Product Offerings
8.7.5 TOKYO KEISO CO.,LTD Recent Development
8.8 Sensirion
8.8.1 Sensirion Company Information
8.8.2 Sensirion Introduction and Business Overview
8.8.3 Sensirion Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
8.8.4 Sensirion Mass Flow Controller Product Offerings
8.8.5 Sensirion Recent Development
8.9 AZBIL
8.9.1 AZBIL Company Information
8.9.2 AZBIL Introduction and Business Overview
8.9.3 AZBIL Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
8.9.4 AZBIL Mass Flow Controller Product Offerings
8.9.5 AZBIL Recent Development
8.10 Sierra Instruments
8.10.1 Sierra Instruments Company Information
8.10.2 Sierra Instruments Introduction and Business Overview
8.10.3 Sierra Instruments Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
8.10.4 Sierra Instruments Mass Flow Controller Product Offerings
8.10.5 Sierra Instruments Recent Development
8.11 Teledyne
8.11.1 Teledyne Company Information
8.11.2 Teledyne Introduction and Business Overview
8.11.3 Teledyne Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
8.11.4 Teledyne Mass Flow Controller Product Offerings
8.11.5 Teledyne Recent Development
8.12 Omega
8.12.1 Omega Company Information
8.12.2 Omega Introduction and Business Overview
8.12.3 Omega Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
8.12.4 Omega Mass Flow Controller Product Offerings
8.12.5 Omega Recent Development
8.13 Hitachi Metals, Ltd
8.13.1 Hitachi Metals, Ltd Company Information
8.13.2 Hitachi Metals, Ltd Introduction and Business Overview
8.13.3 Hitachi Metals, Ltd Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
8.13.4 Hitachi Metals, Ltd Mass Flow Controller Product Offerings
8.13.5 Hitachi Metals, Ltd Recent Development
8.14 Parker Hannifin
8.14.1 Parker Hannifin Company Information
8.14.2 Parker Hannifin Introduction and Business Overview
8.14.3 Parker Hannifin Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
8.14.4 Parker Hannifin Mass Flow Controller Product Offerings
8.14.5 Parker Hannifin Recent Development
8.15 Kofloc
8.15.1 Kofloc Company Information
8.15.2 Kofloc Introduction and Business Overview
8.15.3 Kofloc Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
8.15.4 Kofloc Mass Flow Controller Product Offerings
8.15.5 Kofloc Recent Development
8.16 ACCU
8.16.1 ACCU Company Information
8.16.2 ACCU Introduction and Business Overview
8.16.3 ACCU Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
8.16.4 ACCU Mass Flow Controller Product Offerings
8.16.5 ACCU Recent Development
8.17 Fujikin
8.17.1 Fujikin Company Information
8.17.2 Fujikin Introduction and Business Overview
8.17.3 Fujikin Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
8.17.4 Fujikin Mass Flow Controller Product Offerings
8.17.5 Fujikin Recent Development
8.18 Pivotal Systems
8.18.1 Pivotal Systems Company Information
8.18.2 Pivotal Systems Introduction and Business Overview
8.18.3 Pivotal Systems Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
8.18.4 Pivotal Systems Mass Flow Controller Product Offerings
8.18.5 Pivotal Systems Recent Development
8.19 MKP
8.19.1 MKP Company Information
8.19.2 MKP Introduction and Business Overview
8.19.3 MKP Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
8.19.4 MKP Mass Flow Controller Product Offerings
8.19.5 MKP Recent Development
8.20 Alicat
8.20.1 Alicat Company Information
8.20.2 Alicat Introduction and Business Overview
8.20.3 Alicat Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
8.20.4 Alicat Mass Flow Controller Product Offerings
8.20.5 Alicat Recent Development
8.21 Lintec
8.21.1 Lintec Company Information
8.21.2 Lintec Introduction and Business Overview
8.21.3 Lintec Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
8.21.4 Lintec Mass Flow Controller Product Offerings
8.21.5 Lintec Recent Development
8.22 AXETRIS
8.22.1 AXETRIS Company Information
8.22.2 AXETRIS Introduction and Business Overview
8.22.3 AXETRIS Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
8.22.4 AXETRIS Mass Flow Controller Product Offerings
8.22.5 AXETRIS Recent Development
8.23 Vögtlin Instruments GmbH
8.23.1 Vögtlin Instruments GmbH Company Information
8.23.2 Vögtlin Instruments GmbH Introduction and Business Overview
8.23.3 Vögtlin Instruments GmbH Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
8.23.4 Vögtlin Instruments GmbH Mass Flow Controller Product Offerings
8.23.5 Vögtlin Instruments GmbH Recent Development
8.24 ACE
8.24.1 ACE Company Information
8.24.2 ACE Introduction and Business Overview
8.24.3 ACE Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
8.24.4 ACE Mass Flow Controller Product Offerings
8.24.5 ACE Recent Development
9 Industry Chain Analysis
9.1 Mass Flow Controller Industrial Chain
9.2 Mass Flow Controller Upstream Analysis
9.2.1 Key Raw Materials
9.2.2 Raw Materials Key Suppliers
9.2.3 Manufacturing Cost Structure
9.3 Midstream Analysis
9.4 Downstream Analysis (Customers Analysis)
9.5 Sales Model and Sales Channels
9.5.1 Mass Flow Controller Sales Model
9.5.2 Sales Channel
9.5.3 Mass Flow Controller Distributors
10 Research Findings and Conclusion
11 Appendix
11.1 Research Methodology
11.1.1 Methodology/Research Approach
11.1.1.1 Research Programs/Design
11.1.1.2 Market Size Estimation
11.1.1.3 Market Breakdown and Data Triangulation
11.1.2 Data Source
11.1.2.1 Secondary Sources
11.1.2.2 Primary Sources
11.2 Author Details
11.3 Disclaimer