Summary

The global market for Thermal Mass Flow Controller was estimated to be worth US$ 934 million in 2024 and is forecast to a readjusted size of US$ 1605 million by 2031 with a CAGR of 7.5% during the forecast period 2025-2031.
This report provides a comprehensive assessment of recent tariff adjustments and international strategic countermeasures on Thermal Mass Flow Controller cross-border industrial footprints, capital allocation patterns, regional economic interdependencies, and supply chain reconfigurations.
A Thermal Mass Flow Controller (Thermal MFC) is a flow control device that uses the principle of heat transfer to measure and regulate the mass flow rate of gases. It operates by heating a small portion of the gas stream and detecting the temperature difference between upstream and downstream sensors; this temperature differential is directly proportional to the mass flow of the gas, allowing the device to calculate and control flow independent of pressure and temperature fluctuations. A thermal MFC integrates a flow sensor, a proportional control valve, and an electronic control circuit that continuously compares the actual flow with the setpoint and adjusts the valve opening to maintain precise, stable delivery. Because of their high accuracy, repeatability, and ability to handle very low flow rates, thermal MFCs are widely used in semiconductor manufacturing, pharmaceuticals, chemical processing, energy systems, environmental monitoring, and laboratory research, where reliable and precise gas dosing or mixing is essential for process stability and product quality.

In 2024, global Thermal Mass Flow Controller production reached approximately 980,000 units , with an average global market price of around US$ 950 per unit.
The Thermal Mass Flow Controller (Thermal MFC) market demonstrates strong growth potential, driven by the rising global need for precise and reliable gas flow measurement and control across high-value industries such as semiconductors, pharmaceuticals, biotechnology, specialty chemicals, energy, and advanced research laboratories, as thermal MFCs leverage heat transfer principles to deliver exceptional accuracy, stability, and repeatability, particularly at ultra-low and highly sensitive flow rates, making them indispensable in semiconductor fabrication processes like CVD, ALD, and etching, where tight control of process gases directly impacts wafer yield, while the pharmaceutical and biotech sectors increasingly rely on thermal MFCs for accurate dosing and mixing of gases in drug formulation, fermentation, and cleanroom environments to meet stringent regulatory requirements, and the chemical industry deploys them for safe and efficient handling of corrosive or specialty gases, ensuring consistent product quality and process safety; further opportunities emerge from the global transition toward renewable energy and hydrogen-based economies, as fuel cell development, hydrogen production, and gas analysis systems demand precise gas flow control, while environmental monitoring applications, including emissions testing and air quality analysis, reinforce adoption; advancements in automation and Industry 4.0 are accelerating the integration of smart thermal MFCs with digital communication protocols, remote monitoring, and predictive maintenance capabilities, which enhance operational efficiency and reduce downtime, appealing to manufacturers seeking cost-effective solutions; geographically, Asia-Pacific is leading demand growth due to massive semiconductor and electronics investments, while North America and Europe maintain strong adoption across pharmaceuticals, research, and clean energy projects; as innovations in compact design, faster response times, multi-gas calibration, and expanded flow range broaden their applications, and sustainability initiatives push industries toward higher efficiency and reduced emissions, the thermal mass flow controller market is set to expand robustly, offering long-term opportunities for manufacturers, technology developers, and investors positioned to capitalize on the convergence of precision engineering, digitalization, and green energy trends.

This report aims to provide a comprehensive presentation of the global market for Thermal Mass Flow Controller, focusing on the total sales volume, sales revenue, price, key companies market share and ranking, together with an analysis of Thermal Mass Flow Controller by region & country, by Type, and by Application.
The Thermal Mass Flow Controller market size, estimations, and forecasts are provided in terms of sales volume (K Units) and sales revenue ($ millions), considering 2024 as the base year, with history and forecast data for the period from 2020 to 2031. With both quantitative and qualitative analysis, to help readers develop business/growth strategies, assess the market competitive situation, analyze their position in the current marketplace, and make informed business decisions regarding Thermal Mass Flow Controller.

Market Segmentation
By Company
HORIBA
Bronkhorst
MKS Instruments
Brooks
Bürkert
TOKYO KEISO CO.,LTD
Sensirion
AZBIL
Sierra Instruments
Teledyne
Omega
Hitachi Metals, Ltd
Parker Hannifin
Beijing Aurasky
Kofloc
Accu
Fujikin
Segment by Type
Digital
Analog
Segment by Application
Semiconductor Manufacturing
FPD Industry
Vacuum Coating
General Industry
Others
By Region
North America
United States
Canada
Asia-Pacific
China
Japan
South Korea
Southeast Asia
India
Australia
Rest of Asia-Pacific
Europe
Germany
France
U.K.
Italy
Netherlands
Nordic Countries
Rest of Europe
Latin America
Mexico
Brazil
Rest of Latin America
Middle East & Africa
Turkey
Saudi Arabia
UAE
Rest of MEA
Chapter Outline
Chapter 1: Introduces the report scope of the report, global total market size (value, volume and price). This chapter also provides the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by manufacturers in the industry, and the analysis of relevant policies in the industry.
Chapter 2: Detailed analysis of Thermal Mass Flow Controller manufacturers competitive landscape, price, sales and revenue market share, latest development plan, merger, and acquisition information, etc.
Chapter 3: Provides the analysis of various market segments by Type, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different market segments.
Chapter 4: Provides the analysis of various market segments by Application, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.
Chapter 5: Sales, revenue of Thermal Mass Flow Controller in regional level. It provides a quantitative analysis of the market size and development potential of each region and introduces the market development, future development prospects, market space, and market size of each country in the world.
Chapter 6: Sales, revenue of Thermal Mass Flow Controller in country level. It provides sigmate data by Type, and by Application for each country/region.
Chapter 7: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product sales, revenue, price, gross margin, product introduction, recent development, etc.
Chapter 8: Analysis of industrial chain, including the upstream and downstream of the industry.
Chapter 9: Conclusion.

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Table of Contents

1 Market Overview
1.1 Thermal Mass Flow Controller Product Introduction
1.2 Global Thermal Mass Flow Controller Market Size Forecast
1.2.1 Global Thermal Mass Flow Controller Sales Value (2020-2031)
1.2.2 Global Thermal Mass Flow Controller Sales Volume (2020-2031)
1.2.3 Global Thermal Mass Flow Controller Sales Price (2020-2031)
1.3 Thermal Mass Flow Controller Market Trends & Drivers
1.3.1 Thermal Mass Flow Controller Industry Trends
1.3.2 Thermal Mass Flow Controller Market Drivers & Opportunity
1.3.3 Thermal Mass Flow Controller Market Challenges
1.3.4 Thermal Mass Flow Controller Market Restraints
1.4 Assumptions and Limitations
1.5 Study Objectives
1.6 Years Considered
2 Competitive Analysis by Company
2.1 Global Thermal Mass Flow Controller Players Revenue Ranking (2024)
2.2 Global Thermal Mass Flow Controller Revenue by Company (2020-2025)
2.3 Global Thermal Mass Flow Controller Players Sales Volume Ranking (2024)
2.4 Global Thermal Mass Flow Controller Sales Volume by Company Players (2020-2025)
2.5 Global Thermal Mass Flow Controller Average Price by Company (2020-2025)
2.6 Key Manufacturers Thermal Mass Flow Controller Manufacturing Base and Headquarters
2.7 Key Manufacturers Thermal Mass Flow Controller Product Offered
2.8 Key Manufacturers Time to Begin Mass Production of Thermal Mass Flow Controller
2.9 Thermal Mass Flow Controller Market Competitive Analysis
2.9.1 Thermal Mass Flow Controller Market Concentration Rate (2020-2025)
2.9.2 Global 5 and 10 Largest Manufacturers by Thermal Mass Flow Controller Revenue in 2024
2.9.3 Global Top Manufacturers by Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Revenue in Thermal Mass Flow Controller as of 2024)
2.10 Mergers & Acquisitions, Expansion
3 Segmentation by Type
3.1 Introduction by Type
3.1.1 Digital
3.1.2 Analog
3.2 Global Thermal Mass Flow Controller Sales Value by Type
3.2.1 Global Thermal Mass Flow Controller Sales Value by Type (2020 VS 2024 VS 2031)
3.2.2 Global Thermal Mass Flow Controller Sales Value, by Type (2020-2031)
3.2.3 Global Thermal Mass Flow Controller Sales Value, by Type (%) (2020-2031)
3.3 Global Thermal Mass Flow Controller Sales Volume by Type
3.3.1 Global Thermal Mass Flow Controller Sales Volume by Type (2020 VS 2024 VS 2031)
3.3.2 Global Thermal Mass Flow Controller Sales Volume, by Type (2020-2031)
3.3.3 Global Thermal Mass Flow Controller Sales Volume, by Type (%) (2020-2031)
3.4 Global Thermal Mass Flow Controller Average Price by Type (2020-2031)
4 Segmentation by Application
4.1 Introduction by Application
4.1.1 Semiconductor Manufacturing
4.1.2 FPD Industry
4.1.3 Vacuum Coating
4.1.4 General Industry
4.1.5 Others
4.2 Global Thermal Mass Flow Controller Sales Value by Application
4.2.1 Global Thermal Mass Flow Controller Sales Value by Application (2020 VS 2024 VS 2031)
4.2.2 Global Thermal Mass Flow Controller Sales Value, by Application (2020-2031)
4.2.3 Global Thermal Mass Flow Controller Sales Value, by Application (%) (2020-2031)
4.3 Global Thermal Mass Flow Controller Sales Volume by Application
4.3.1 Global Thermal Mass Flow Controller Sales Volume by Application (2020 VS 2024 VS 2031)
4.3.2 Global Thermal Mass Flow Controller Sales Volume, by Application (2020-2031)
4.3.3 Global Thermal Mass Flow Controller Sales Volume, by Application (%) (2020-2031)
4.4 Global Thermal Mass Flow Controller Average Price by Application (2020-2031)
5 Segmentation by Region
5.1 Global Thermal Mass Flow Controller Sales Value by Region
5.1.1 Global Thermal Mass Flow Controller Sales Value by Region: 2020 VS 2024 VS 2031
5.1.2 Global Thermal Mass Flow Controller Sales Value by Region (2020-2025)
5.1.3 Global Thermal Mass Flow Controller Sales Value by Region (2026-2031)
5.1.4 Global Thermal Mass Flow Controller Sales Value by Region (%), (2020-2031)
5.2 Global Thermal Mass Flow Controller Sales Volume by Region
5.2.1 Global Thermal Mass Flow Controller Sales Volume by Region: 2020 VS 2024 VS 2031
5.2.2 Global Thermal Mass Flow Controller Sales Volume by Region (2020-2025)
5.2.3 Global Thermal Mass Flow Controller Sales Volume by Region (2026-2031)
5.2.4 Global Thermal Mass Flow Controller Sales Volume by Region (%), (2020-2031)
5.3 Global Thermal Mass Flow Controller Average Price by Region (2020-2031)
5.4 North America
5.4.1 North America Thermal Mass Flow Controller Sales Value, 2020-2031
5.4.2 North America Thermal Mass Flow Controller Sales Value by Country (%), 2024 VS 2031
5.5 Europe
5.5.1 Europe Thermal Mass Flow Controller Sales Value, 2020-2031
5.5.2 Europe Thermal Mass Flow Controller Sales Value by Country (%), 2024 VS 2031
5.6 Asia Pacific
5.6.1 Asia Pacific Thermal Mass Flow Controller Sales Value, 2020-2031
5.6.2 Asia Pacific Thermal Mass Flow Controller Sales Value by Region (%), 2024 VS 2031
5.7 South America
5.7.1 South America Thermal Mass Flow Controller Sales Value, 2020-2031
5.7.2 South America Thermal Mass Flow Controller Sales Value by Country (%), 2024 VS 2031
5.8 Middle East & Africa
5.8.1 Middle East & Africa Thermal Mass Flow Controller Sales Value, 2020-2031
5.8.2 Middle East & Africa Thermal Mass Flow Controller Sales Value by Country (%), 2024 VS 2031
6 Segmentation by Key Countries/Regions
6.1 Key Countries/Regions Thermal Mass Flow Controller Sales Value Growth Trends, 2020 VS 2024 VS 2031
6.2 Key Countries/Regions Thermal Mass Flow Controller Sales Value and Sales Volume
6.2.1 Key Countries/Regions Thermal Mass Flow Controller Sales Value, 2020-2031
6.2.2 Key Countries/Regions Thermal Mass Flow Controller Sales Volume, 2020-2031
6.3 United States
6.3.1 United States Thermal Mass Flow Controller Sales Value, 2020-2031
6.3.2 United States Thermal Mass Flow Controller Sales Value by Type (%), 2024 VS 2031
6.3.3 United States Thermal Mass Flow Controller Sales Value by Application, 2024 VS 2031
6.4 Europe
6.4.1 Europe Thermal Mass Flow Controller Sales Value, 2020-2031
6.4.2 Europe Thermal Mass Flow Controller Sales Value by Type (%), 2024 VS 2031
6.4.3 Europe Thermal Mass Flow Controller Sales Value by Application, 2024 VS 2031
6.5 China
6.5.1 China Thermal Mass Flow Controller Sales Value, 2020-2031
6.5.2 China Thermal Mass Flow Controller Sales Value by Type (%), 2024 VS 2031
6.5.3 China Thermal Mass Flow Controller Sales Value by Application, 2024 VS 2031
6.6 Japan
6.6.1 Japan Thermal Mass Flow Controller Sales Value, 2020-2031
6.6.2 Japan Thermal Mass Flow Controller Sales Value by Type (%), 2024 VS 2031
6.6.3 Japan Thermal Mass Flow Controller Sales Value by Application, 2024 VS 2031
6.7 South Korea
6.7.1 South Korea Thermal Mass Flow Controller Sales Value, 2020-2031
6.7.2 South Korea Thermal Mass Flow Controller Sales Value by Type (%), 2024 VS 2031
6.7.3 South Korea Thermal Mass Flow Controller Sales Value by Application, 2024 VS 2031
6.8 Southeast Asia
6.8.1 Southeast Asia Thermal Mass Flow Controller Sales Value, 2020-2031
6.8.2 Southeast Asia Thermal Mass Flow Controller Sales Value by Type (%), 2024 VS 2031
6.8.3 Southeast Asia Thermal Mass Flow Controller Sales Value by Application, 2024 VS 2031
6.9 India
6.9.1 India Thermal Mass Flow Controller Sales Value, 2020-2031
6.9.2 India Thermal Mass Flow Controller Sales Value by Type (%), 2024 VS 2031
6.9.3 India Thermal Mass Flow Controller Sales Value by Application, 2024 VS 2031
7 Company Profiles
7.1 HORIBA
7.1.1 HORIBA Company Information
7.1.2 HORIBA Introduction and Business Overview
7.1.3 HORIBA Thermal Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
7.1.4 HORIBA Thermal Mass Flow Controller Product Offerings
7.1.5 HORIBA Recent Development
7.2 Bronkhorst
7.2.1 Bronkhorst Company Information
7.2.2 Bronkhorst Introduction and Business Overview
7.2.3 Bronkhorst Thermal Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
7.2.4 Bronkhorst Thermal Mass Flow Controller Product Offerings
7.2.5 Bronkhorst Recent Development
7.3 MKS Instruments
7.3.1 MKS Instruments Company Information
7.3.2 MKS Instruments Introduction and Business Overview
7.3.3 MKS Instruments Thermal Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
7.3.4 MKS Instruments Thermal Mass Flow Controller Product Offerings
7.3.5 MKS Instruments Recent Development
7.4 Brooks
7.4.1 Brooks Company Information
7.4.2 Brooks Introduction and Business Overview
7.4.3 Brooks Thermal Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
7.4.4 Brooks Thermal Mass Flow Controller Product Offerings
7.4.5 Brooks Recent Development
7.5 Bürkert
7.5.1 Bürkert Company Information
7.5.2 Bürkert Introduction and Business Overview
7.5.3 Bürkert Thermal Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
7.5.4 Bürkert Thermal Mass Flow Controller Product Offerings
7.5.5 Bürkert Recent Development
7.6 TOKYO KEISO CO.,LTD
7.6.1 TOKYO KEISO CO.,LTD Company Information
7.6.2 TOKYO KEISO CO.,LTD Introduction and Business Overview
7.6.3 TOKYO KEISO CO.,LTD Thermal Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
7.6.4 TOKYO KEISO CO.,LTD Thermal Mass Flow Controller Product Offerings
7.6.5 TOKYO KEISO CO.,LTD Recent Development
7.7 Sensirion
7.7.1 Sensirion Company Information
7.7.2 Sensirion Introduction and Business Overview
7.7.3 Sensirion Thermal Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
7.7.4 Sensirion Thermal Mass Flow Controller Product Offerings
7.7.5 Sensirion Recent Development
7.8 AZBIL
7.8.1 AZBIL Company Information
7.8.2 AZBIL Introduction and Business Overview
7.8.3 AZBIL Thermal Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
7.8.4 AZBIL Thermal Mass Flow Controller Product Offerings
7.8.5 AZBIL Recent Development
7.9 Sierra Instruments
7.9.1 Sierra Instruments Company Information
7.9.2 Sierra Instruments Introduction and Business Overview
7.9.3 Sierra Instruments Thermal Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
7.9.4 Sierra Instruments Thermal Mass Flow Controller Product Offerings
7.9.5 Sierra Instruments Recent Development
7.10 Teledyne
7.10.1 Teledyne Company Information
7.10.2 Teledyne Introduction and Business Overview
7.10.3 Teledyne Thermal Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
7.10.4 Teledyne Thermal Mass Flow Controller Product Offerings
7.10.5 Teledyne Recent Development
7.11 Omega
7.11.1 Omega Company Information
7.11.2 Omega Introduction and Business Overview
7.11.3 Omega Thermal Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
7.11.4 Omega Thermal Mass Flow Controller Product Offerings
7.11.5 Omega Recent Development
7.12 Hitachi Metals, Ltd
7.12.1 Hitachi Metals, Ltd Company Information
7.12.2 Hitachi Metals, Ltd Introduction and Business Overview
7.12.3 Hitachi Metals, Ltd Thermal Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
7.12.4 Hitachi Metals, Ltd Thermal Mass Flow Controller Product Offerings
7.12.5 Hitachi Metals, Ltd Recent Development
7.13 Parker Hannifin
7.13.1 Parker Hannifin Company Information
7.13.2 Parker Hannifin Introduction and Business Overview
7.13.3 Parker Hannifin Thermal Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
7.13.4 Parker Hannifin Thermal Mass Flow Controller Product Offerings
7.13.5 Parker Hannifin Recent Development
7.14 Beijing Aurasky
7.14.1 Beijing Aurasky Company Information
7.14.2 Beijing Aurasky Introduction and Business Overview
7.14.3 Beijing Aurasky Thermal Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
7.14.4 Beijing Aurasky Thermal Mass Flow Controller Product Offerings
7.14.5 Beijing Aurasky Recent Development
7.15 Kofloc
7.15.1 Kofloc Company Information
7.15.2 Kofloc Introduction and Business Overview
7.15.3 Kofloc Thermal Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
7.15.4 Kofloc Thermal Mass Flow Controller Product Offerings
7.15.5 Kofloc Recent Development
7.16 Accu
7.16.1 Accu Company Information
7.16.2 Accu Introduction and Business Overview
7.16.3 Accu Thermal Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
7.16.4 Accu Thermal Mass Flow Controller Product Offerings
7.16.5 Accu Recent Development
7.17 Fujikin
7.17.1 Fujikin Company Information
7.17.2 Fujikin Introduction and Business Overview
7.17.3 Fujikin Thermal Mass Flow Controller Sales, Revenue, Price and Gross Margin (2020-2025)
7.17.4 Fujikin Thermal Mass Flow Controller Product Offerings
7.17.5 Fujikin Recent Development
8 Industry Chain Analysis
8.1 Thermal Mass Flow Controller Industrial Chain
8.2 Thermal Mass Flow Controller Upstream Analysis
8.2.1 Key Raw Materials
8.2.2 Raw Materials Key Suppliers
8.2.3 Manufacturing Cost Structure
8.3 Midstream Analysis
8.4 Downstream Analysis (Customers Analysis)
8.5 Sales Model and Sales Channels
8.5.1 Thermal Mass Flow Controller Sales Model
8.5.2 Sales Channel
8.5.3 Thermal Mass Flow Controller Distributors
9 Research Findings and Conclusion
10 Appendix
10.1 Research Methodology
10.1.1 Methodology/Research Approach
10.1.1.1 Research Programs/Design
10.1.1.2 Market Size Estimation
10.1.1.3 Market Breakdown and Data Triangulation
10.1.2 Data Source
10.1.2.1 Secondary Sources
10.1.2.2 Primary Sources
10.2 Author Details
10.3 Disclaimer