{"id":622,"date":"2026-06-08T17:05:57","date_gmt":"2026-06-08T08:05:57","guid":{"rendered":"https:\/\/www.dri.co.jp\/info\/?p=622"},"modified":"2026-06-08T17:07:24","modified_gmt":"2026-06-08T08:07:24","slug":"%e3%80%909%e6%9c%8830%e6%97%a5%e9%96%8b%e5%82%ac%e3%80%91%e3%83%8d%e3%82%aa%e3%83%86%e3%82%af%e3%83%8e%e3%83%ad%e3%82%b8%e3%83%bc%e7%84%a1%e6%96%99%e3%82%bb%e3%83%9f%e3%83%8a%e3%83%bc-2","status":"publish","type":"post","link":"https:\/\/www.dri.co.jp\/info\/seminar\/622","title":{"rendered":"\u30106\u670812\u65e5\u958b\u50ac\u3011\u30cd\u30aa\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u7121\u6599\u30bb\u30df\u30ca\u30fc"},"content":{"rendered":"\n

\u7279\u8a31\u60c5\u5831\u304b\u3089\u8aad\u307f\u89e3\u304f \u534a\u5c0e\u4f53\u30d7\u30e9\u30ba\u30de\u539f\u5b50\u5c64\u30a8\u30c3\u30c1\u30f3\u30b0\uff08ALE\uff09\u6700\u524d\u7dda<\/strong><\/p>\n\n\n\n

\u25c6\u958b\u50ac\u65e5\u6642\uff1a2026\u5e746\u670812\u65e5(\u91d1)\u300011:00\uff5e11:30
\u25c6\u30bb\u30df\u30ca\u30fc\u5f62\u614b\uff1a\u30aa\u30f3\u30e9\u30a4\u30f3\u8996\u8074\uff08ZOOM \u53d7\u8b1b\u6599\u7121\u6599\uff09<\/p>\n\n\n\n

\u25a0\u30bb\u30df\u30ca\u30fc\u6982\u8981<\/strong>
\u534a\u5c0e\u4f53\u306e\u5fae\u7d30\u5316\u30843D\u69cb\u9020\u5316\u304c\u9032\u3080\u4e2d\u3001\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306b\u306f\u3001\u3088\u308a\u9ad8\u7cbe\u5ea6\u304b\u3064\u4f4e\u30c0\u30e1\u30fc\u30b8\u306a\u52a0\u5de5\u6280\u8853\u304c\u6c42\u3081\u3089\u308c\u3066\u3044\u307e\u3059\u3002\u3053\u308c\u307e\u3067\u3001\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u819c\u5f62\u6210\u3092\u5236\u5fa1\u3059\u308bALD\uff08Atomic Layer Deposition\uff09\u306f\u3001High-k\u6750\u6599\u30843D NAND\u3001GAA\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306a\u3069\u306e\u9032\u5c55\u3092\u652f\u3048\u308b\u91cd\u8981\u6280\u8853\u3068\u3057\u3066\u767a\u5c55\u3057\u3066\u304d\u307e\u3057\u305f\u3002

\u8fd1\u5e74\u3067\u306f\u3001\u305d\u306e\u6d41\u308c\u3092\u53d7\u3051\u3001\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u52a0\u5de5\u3092\u5236\u5fa1\u3059\u308bALE\uff08Atomic Layer Etching\uff1a\u539f\u5b50\u5c64\u30a8\u30c3\u30c1\u30f3\u30b0\uff09\u304c\u3001\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u3092\u652f\u3048\u308b\u65b0\u305f\u306a\u30ad\u30fc\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u3068\u3057\u3066\u6ce8\u76ee\u3092\u96c6\u3081\u3066\u3044\u307e\u3059\u3002\u7279\u306b\u3001GAA\/CFET\u69cb\u9020\u3001\u9ad8\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u52a0\u5de5\u3001\u4f4e\u30c0\u30e1\u30fc\u30b8\u30d7\u30ed\u30bb\u30b9\u3001\u7570\u7a2e\u6750\u6599\u754c\u9762\u5236\u5fa1\u306a\u3069\u3001\u5f93\u6765\u306e\u30a8\u30c3\u30c1\u30f3\u30b0\u6280\u8853\u3067\u306f\u5bfe\u5fdc\u304c\u96e3\u3057\u3044\u9818\u57df\u306b\u304a\u3044\u3066\u3001ALE\u3078\u306e\u671f\u5f85\u304c\u9ad8\u307e\u3063\u3066\u3044\u307e\u3059\u3002
 
\u672c\u30bb\u30df\u30ca\u30fc\u3067\u306f\u3001\u6700\u65b0\u7279\u8a31\u60c5\u5831\u3092\u3082\u3068\u306b\u3001ALE\u95a2\u9023\u6280\u8853\u306e\u7814\u7a76\u958b\u767a\u52d5\u5411\u3092\u4fef\u77b0\u7684\u306b\u6574\u7406\u3057\u307e\u3059\u3002
\u5358\u306a\u308b\u88c5\u7f6e\u6280\u8853\u3068\u3057\u3066\u3067\u306f\u306a\u304f\u3001

\u30fb\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u304c\u6c42\u3081\u308b\u52a0\u5de5\u8981\u4ef6
\u30fb\u6750\u6599\u30fb\u8868\u9762\u51e6\u7406\u6280\u8853\u3078\u306e\u65b0\u305f\u306a\u8981\u6c42
\u30fbALD\u304b\u3089ALE\u3078\u3068\u5e83\u304c\u308b\u539f\u5b50\u30ec\u30d9\u30eb\u5236\u5fa1\u6280\u8853\u306e\u6f6e\u6d41
\u30fbALD\u9818\u57df\u3067\u5148\u884c\u3059\u308b\u88c5\u7f6e\u30e1\u30fc\u30ab\u30fc\u5404\u793e\u306eALE\u95a2\u9023\u52d5\u5411

\u306a\u3069\u3092\u901a\u3058\u3066\u3001\u4eca\u5f8c\u306e\u6280\u8853\u9032\u5316\u3084\u5e02\u5834\u6a5f\u4f1a\u3092\u8aad\u307f\u89e3\u304d\u307e\u3059\u3002

\u307e\u305f\u3001ASM International \u3084 \u6771\u4eac\u30a8\u30ec\u30af\u30c8\u30ed\u30f3 \u3092\u306f\u3058\u3081\u3001ALD\u5206\u91ce\u3067\u5148\u884c\u3057\u3066\u304d\u305f\u88c5\u7f6e\u30e1\u30fc\u30ab\u30fc\u5404\u793e\u306e\u6280\u8853\u958b\u767a\u52d5\u5411\u306f\u3001\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u52a0\u5de5\u8ab2\u984c\u3084\u6750\u6599\u8981\u6c42\u306e\u5909\u5316\u3092\u628a\u63e1\u3059\u308b\u4e0a\u3067\u91cd\u8981\u306a\u793a\u5506\u3092\u4e0e\u3048\u3066\u3044\u307e\u3059\u3002\u672c\u30bb\u30df\u30ca\u30fc\u3067\u306f\u3001\u3053\u3046\u3057\u305f\u4e3b\u8981\u30d7\u30ec\u30a4\u30e4\u30fc\u306e\u7279\u8a31\u51fa\u9858\u52d5\u5411\u3082\u8e0f\u307e\u3048\u306a\u304c\u3089\u3001ALE\u6280\u8853\u306e\u9032\u5316\u65b9\u5411\u3068\u95a2\u9023\u5e02\u5834\u3078\u306e\u6ce2\u53ca\u53ef\u80fd\u6027\u306b\u3064\u3044\u3066\u8003\u5bdf\u3057\u307e\u3059\u3002

\u88c5\u7f6e\u30e1\u30fc\u30ab\u30fc\u306e\u307f\u306a\u3089\u305a\u3001\u534a\u5c0e\u4f53\u5e02\u5834\u3078\u306e\u53c2\u5165\u3084\u7528\u9014\u5c55\u958b\u3092\u691c\u8a0e\u3059\u308b\u6750\u6599\u30e1\u30fc\u30ab\u30fc\u3001\u5316\u5b66\u30e1\u30fc\u30ab\u30fc\u3001\u90e8\u6750\u30e1\u30fc\u30ab\u30fc\u3001\u30c7\u30d0\u30a4\u30b9\u30e1\u30fc\u30ab\u30fc\u306e\u7814\u7a76\u4f01\u753b\u30fb\u6280\u8853\u6226\u7565\u90e8\u9580\u306b\u5411\u3051\u3066\u3001\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u5206\u91ce\u306b\u304a\u3051\u308b\u7814\u7a76\u30c6\u30fc\u30de\u63a2\u7d22\u3084\u4e8b\u696d\u6a5f\u4f1a\u767a\u898b\u306e\u30d2\u30f3\u30c8\u3068\u306a\u308b\u5185\u5bb9\u3092\u76ee\u6307\u3057\u307e\u3059\u3002

\u25a0\u3053\u3093\u306a\u65b9\u306b\u304a\u30b9\u30b9\u30e1<\/strong>
\u30fb\u534a\u5c0e\u4f53\u5e02\u5834\u3078\u306e\u5c55\u958b\u3092\u6a21\u7d22\u3057\u3066\u3044\u308b\u5316\u5b66\u30fb\u90e8\u6750\u30e1\u30fc\u30ab\u30fc
\u30fbGAA\/3D\u96c6\u7a4d\u5411\u3051\u6280\u8853\u3092\u63a2\u7d22\u3059\u308b\u30c7\u30d0\u30a4\u30b9\u30e1\u30fc\u30ab\u30fc
\u30fb\u5fae\u7d30\u52a0\u5de5\u30fb\u8868\u9762\u51e6\u7406\u6280\u8853\u306b\u95a2\u5fc3\u3092\u6301\u3064\u7814\u7a76\u958b\u767a\u90e8\u9580
\u30fb\u6b21\u4e16\u4ee3\u30d7\u30ed\u30bb\u30b9\u6280\u8853\u3092\u8abf\u67fb\u3059\u308b\u7814\u7a76\u4f01\u753b\u90e8\u9580
\u30fb\u7279\u8a31\u60c5\u5831\u304b\u3089\u6280\u8853\u30c8\u30ec\u30f3\u30c9\u3092\u628a\u63e1\u3057\u305f\u3044\u77e5\u8ca1\u90e8\u9580

\u25a0\u767b\u58c7\u8005<\/strong>
\u9ed2\u7530\u5409\u5df1\uff08\u682a\u5f0f\u4f1a\u793e\u30cd\u30aa\u30c6\u30af\u30ed\u30b8\u30fc \u6280\u8853\u30a2\u30c9\u30d0\u30a4\u30b6\uff09
\u7cbe\u5bc6\u3001\u5149\u5b66\u6a5f\u5668\u30e1\u30fc\u30ab\u30fc\u306e\u7814\u7a76\u958b\u767a\u90e8\u9580\u3067\u4e3b\u306b\u30c7\u30d0\u30a4\u30b9\u958b\u767a\u306b\u5f93\u4e8b\u3002\u6db2\u6676\u30c7\u30a3\u30b9\u30d7\u30ec\u30a4\u3001\u5f37\u8a98\u96fb\u4f53\u30e1\u30e2\u30ea\u3001MEMS\u3001\u5149\u5b66\u30bb\u30f3\u30b5\u30fc\u306a\u3069\u591a\u304f\u306e\u30c7\u30d0\u30a4\u30b9\u958b\u767a\u306b\u53d6\u308a\u7d44\u307f\u3001\u9ad8\u7cbe\u5ea6\u8d85\u5c0f\u578b\u5149\u5b66\u5f0f\u30a8\u30f3\u30b3\u30fc\u30c0\u3067\u306f\u88fd\u54c1\u5316\u307e\u3067\u7d4c\u9a13\u3002R&D\u7d4c\u9a13\u3092\u751f\u304b\u3057\u305f\u76ee\u5229\u304d\u529b\u3067\u6ce8\u76ee\u767a\u660e\u3092\u62bd\u51fa\u3057\u3001\u5177\u4f53\u4f8b\u3067ALE\u306b\u3064\u3044\u3066\u4fef\u77b0\u3057\u307e\u3059\u3002<\/p>\n\n\n\n

\u25c6\u53c2\u52a0\u304a\u7533\u8fbc\u307f\u306f\u3001\u4e0b\u8a18URL\u3088\u308a\u304a\u7533\u8fbc\u307f\u304f\u3060\u3055\u3044\u3002
\u203b\u53c2\u52a0\u7533\u8fbc\u8005\u306b\u306f\u3001\u524d\u65e5\u307e\u3067\u306b\u8996\u8074\u7528URL\u3092\u30e1\u30fc\u30eb\u3067\u9001\u4ed8\u3044\u305f\u3057\u307e\u3059\u3002
\u304a\u7533\u3057\u8fbc\u307f<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"

\u7279\u8a31\u60c5\u5831\u304b\u3089\u8aad\u307f\u89e3\u304f \u534a\u5c0e\u4f53\u30d7\u30e9\u30ba\u30de\u539f\u5b50\u5c64\u30a8\u30c3\u30c1\u30f3\u30b0\uff08ALE\uff09\u6700\u524d\u7dda \u25c6\u958b\u50ac\u65e5\u6642\uff1a2026\u5e746\u670812\u65e5(\u91d1)\u300011:00\uff5e11:30\u25c6\u30bb\u30df\u30ca\u30fc\u5f62\u614b\uff1a\u30aa\u30f3\u30e9\u30a4\u30f3\u8996\u8074\uff08ZOOM \u53d7\u8b1b\u6599\u7121\u6599\uff09 \u25a0\u30bb\u30df\u30ca\u30fc\u6982\u8981\u534a\u5c0e\u4f53\u306e\u5fae\u7d30\u5316\u30843 […]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":[],"categories":[1],"tags":[],"acf":[],"_links":{"self":[{"href":"https:\/\/www.dri.co.jp\/info\/wp-json\/wp\/v2\/posts\/622"}],"collection":[{"href":"https:\/\/www.dri.co.jp\/info\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.dri.co.jp\/info\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.dri.co.jp\/info\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.dri.co.jp\/info\/wp-json\/wp\/v2\/comments?post=622"}],"version-history":[{"count":6,"href":"https:\/\/www.dri.co.jp\/info\/wp-json\/wp\/v2\/posts\/622\/revisions"}],"predecessor-version":[{"id":628,"href":"https:\/\/www.dri.co.jp\/info\/wp-json\/wp\/v2\/posts\/622\/revisions\/628"}],"wp:attachment":[{"href":"https:\/\/www.dri.co.jp\/info\/wp-json\/wp\/v2\/media?parent=622"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.dri.co.jp\/info\/wp-json\/wp\/v2\/categories?post=622"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.dri.co.jp\/info\/wp-json\/wp\/v2\/tags?post=622"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}